| 摘要(英) |
In the past, the cluster number of wafer NBD (Number of Bad Die) and NCL (Number of Contiguous Line) and the random sprinkling defect were analyzed and simulated by software (MATLAB). In the paper, the search method of cluster number and random sprinkling defect of wafer can be realized by hardware.
In the case of generating pseudo-random numbers on hardware, the mainstream method can be divided into Linear Congruential Generator and Linear Feedback Shift Register. This paper uses linear feedback shift register. The advantage of the linear feedback shift register for random sprinkling is that the architecture is simple and easy to implement. The most important thing is that the speed is faster than linear congruential generator.
In addition, the WM-811K wafer map provided by TSMC has more than one thousand kinds of wafers. Different wafer sizes require different data input which will result in the need to write multiple different sizes of searching cluster number in wafer map circuits. In this paper, Soft-IP can flexibly generate searching cluster number in wafer map circuits of various sizes. Users can flexibly adapt the searching cluster number of wafer map circuits to various parameters through parameter setting. The size of the wafer.
Finally, the proposed circuit architecture is synthesized by Synopsys Design Compiler using TSMC 0.18μm. The experimental results show that the execution time and area of this circuit will increase linearly with the wafer size. Then, in order to verify the feasibility of this soft-IP materialization, I used the most used wafer-W533 in WM-811K to Automatic Placement and Routing through Cadence Innovus, and the circuit can operate at 14ns(71.42MHz)
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| 參考文獻 |
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