Fabrication and Characterization of Electrostatic and Electromagnetic MEMS Vibration Energy Harvesters

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姓名	宮田正三(Shozo Miyata) 查詢紙本館藏	畢業系所	光機電工程研究所
論文名稱	Fabrication and Characterization of Electrostatic and Electromagnetic MEMS Vibration Energy Harvesters (Fabrication and Characterization of Electrostatic and Electromagnetic MEMS Vibration Energy Harvesters)
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摘要(中)	本論文提出了頻率可調的駐極體靜電式能量擷取器和寬頻帶電磁式能量擷取器。其中靜電式元件由彈簧和三角梳狀電極組成，由於梳狀電極之間的靜電力會影響樑的運動，因此可藉由彈簧軟化作用，降低元件的共振頻率。電磁式元件的部分，模擬了線圈的尖端位移、感應電壓與輸出功率。最後比較了靜電式和電磁式能量收集器的性能。
摘要(英)	This paper reports a frequency-tunable electret electrostatic (ES) vibration-based microelectromechanical systems energy harvester and wide bandwidth electromagnetic (EM) energy harvester. For ES type, the proposed device consists of folded-beam springs and triangular-comb electrodes. The electrostatic force between combs affects the movement of the beams, lowering the resonant frequency due to the spring softening effect. The device (size: 2 cm × 2 cm × 750 µm) was fabricated using a conventional microfabrication process. The harvester was charged to about 204 V through a bias temperature procedure and an oxidization process. The resonant frequency was controlled by changing the angle of the shaker on which device was mounted, which changed the initial gap between combs. The experimental results showed that the resonant frequency could be tuned from 54.1 to 55.9 Hz and that the power output was 8.4 µW at maximum and more than 2.7 µW at an acceleration of 7 mGRMS with the optimal resistance of 6 MΩ. A normalized power density of 204 mW/cm3/G2 was achieved. For EM type, the displacement of the tip of the coil, inductive voltage and the optimal output power of 1-DOF and 2-DOF EM energy harvester were simulated. The simulation successfully realizes the same order of the experimental results for all. With written energy harvesters, the performance of the ES and EM energy harvester based on the scaling method was compared and it was found that the tendency of the theory proposed by trimmer and reported harvesters match.
關鍵字(中)	★ 微機電系統 ★ 能量擷取 ★ 電磁式 ★ 靜電式	關鍵字(英)
論文目次	Abstract i Acknowledgement ii Table of Contents iii List of Figures vi List of Tables ix Explanation of Symbols x 1 Introduction 1 1.1 Background 1 1.2 Review 3 1.2.1 Frequency tunable energy harvester 3 1.2.2 Wide bandwidth energy harvester 4 1.3 Objective 5 1.4 Structure 6 2 A frequency-tunable electret electrostatic MEMS vibration energy harvester with triangular-comb electrodes 7 2.1 Principle of electrostatic transducer 7 2.1.1 Principle and dynamic characteristic of comb-type electro-static transducer 7 2.1.2 Principle and dynamic characteristic of parallel-plate-type electrostatic transducer 11 2.1.3 Principle and dynamic characteristic of triangle-comb electrostatic transducer 14 2.1.4 Energy balance and non-linearity 18 2.2 Fabrication of MEMS energy harvester 23 2.2.1 Structure of tunable electrostatic energy harvester 23 2.2.2 Microfabrication process 24 2.2.3 Oxidization process and BT procedure 25 2.2.4 Charged voltage measurement 28 2.2.5 Device parameter 29 2.3 Experimental result and discussion 32 2.3.1 Sweeping frequency experiment 32 2.3.2 Driving at actual environmental vibration 38 3 Simulation of a 2-DOF wide bandwidth energy harvester with silver spiral coils 40 3.1 Simulation for one-coil-layer harvester 40 3.1.1 Motion equation based on mathematical model 40 3.1.2 Parameters for simulation 42 3.1.3 Inductive voltage and generated optimal power 45 3.1.4 Simulation result and discussion for the one-layer-coil harvester 48 3.2 Simulation for two-coil-layer harvester 57 3.2.1 Motion equation, inductive voltage and optimal output power 57 3.2.2 Simulation result and discussion for the two-layer-coil harvester 59 4 The performance comparison between electrostatic and electromagnetic energy harvester in terms of scaling 65 4.1 Trimmer’s scaling law and microsystem 65 4.1.1 Scaling of electromagnetic force 66 4.1.2 Scaling of electrostatic force 71 4.1.3 Power generation and consumption 72 4.2 Performance comparison 73 5 Conclusion and Future Work 75 5.1 Conclusion 75 5.2 Future Work 75 5.2.1 Frequency tunable electrostatic energy harvester 75 5.2.2 Simulation of a 2-DOF electromagnetic energy harvester 76 6 Reference 77
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指導教授	陳世叡橋口原	審核日期	2020-4-1
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