| 摘要(英) |
This paper is based on the DITM test model, and is assisted by an auto-guardbanding test system. Under the premise of assuming the same Defect Level, compare the impact of different repeat test schemes and different testing processes on the test yield.
First, a DITM test model developed with statistical concepts is used, and the test yield and test quality are used as the evaluation criteria for test results. This model is based on the normal distribution, incorporates a number of parameters that express the manufacturing capability and testing capability, and is supplemented by the concepts of testing guard bands and repeated testing, and a new testing mechanism is derived.
Then, by simplifying the repeat test formula and comparing the relationship between the test specification and the test quality diagram, it is decided to use the bisection method to realize the auto-guardbanding test system that automatically plans the test guardband. It can quickly obtain appropriate test specifications under the condition of fixed test quality and frequency.
Finally, with the aid of the above-mentioned test model and test system, firstly compare different repeat test schemes, and then compare the impact of different retest test procedures on the test yield. |
| 參考文獻 |
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