放電複合超音波輔助電化學加工製備微圓柱形陣列電極之研究

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姓名

鄭安傑(An-Jie Jheng) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

放電複合超音波輔助電化學加工製備微圓柱形陣列電極之研究
(A Study on Fabrication of Micro-Cylindrical Array Electrodes by Electrical Discharge Machining combined with Ultrasonic Assisted Electrochemical Machining)

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摘要(中)

當採用線切割放電加工製備之陣列電極進行電化學製備微圓柱形陣列電極時，由於無法採用旋轉多個電極或設計電極內流道等方法來更新電解液，難以加工出尺寸精度良好之微圓柱形陣列電極，為了克服前述各困難點，本論文設計一新型向上噴流式電解液供給治具與超音波振動微陣列電極，並在加工過程中，於另一銅電極之陣列孔內往復移動微陣列電極，進行電化學製備微圓柱形陣列電極，並探討加工時間、工作電壓、脈衝休止時間與超音波功率等級等不同加工參數對電極之整體形貌、極針平均直徑、整體平均直徑、整體直徑全距、極針平均消耗長、整體平均消耗長、整體消耗長全距及整體直徑差等各種加工特性之影響。
實驗結果顯示，採用向上噴流式電解液供給型式相較於相較於傳統向下噴流式電解液供給型式，能得到更高之電解液流速；且微陣列電極行往復運動可有效減少電場尖端效應之影響，而超音波振動會產生泵吸作用與空蝕作用，促進電解液更新並排除電化學反應物，透過上述方法可均勻化加工區域電場，加速電解液更新並快速排除加工區域中的反應熱與電化學反應物，且相較於僅使用向上噴流輔助或超音波輔助，可以得到較佳之電極形貌與較小電極平均直徑。當採用本研究最佳實驗參數組合為加工時間7 s、工作電壓9 V、脈衝休止時間50 us及超音波功率等級Level 10時，可得到最佳電極平均直徑61.3 um、電極平均消耗長122.3 um與電極直徑差5.4 um，且能有效改善電極整體形貌。

摘要(英)

When the array electrodes that are fabricated by wire electrical discharge machining used to fabricate the micro-cylindrical array electrodes by electrochemical machining, the electrolyte cannot be renewed by rotating multiple electrodes or designing the flow channels in the electrodes. This makes it difficult to process micro-cylindrical array electrodes with good electrode morphology and accuracy. To overcome the aforementioned difficulties, in this study, a new type of upward jet electrolyte supply fixture was designed. In the design, ultrasonic vibration-assisted microarray electrodes and microarray electrodes perform a reciprocating motion in the array hole of another copper electrode during the processing to conduct electrochemical fabricate micro-cylindrical array electrodes. The various machining parameters, such as machining time, working voltage, pulse off time, power of ultrasonic vibration, and effect on the various processing characteristics, were discussed, including electrode of morphology, average diameter, average diameter of electrode, average diameter range, average consumption length, average consumption of electrode, average consumption range, and diameter difference.
The experimental results show that the upward jet electrolyte supply type could obtain a higher electrolyte flow rate compared with the traditional downward jet electrolyte supply type. Further, the reciprocating motion of the microarray electrode could effectively reduce the influence of the tip effect of the electric field, and the ultrasonic vibration would produce pumping and cavitation effects to promote electrolyte renewal and remove electrolysis products. Through these above methods, the design will homogenize the electric field in the processing area, accelerate the electrolyte renewal, and quickly remove the reaction heat and electrolysis products in the processing area. Using this approach, compared to only upward jet flow assistance or ultrasonic vibration assistance independently, better electrode morphology and smaller average electrode diameter could be obtained. When the optimal combination of experimental parameters was a machining time of 7 s, working voltage of 9 V, pulse off time of 50 us, and power of ultrasonic vibration of Level 10, this resulted in an optimal average electrode diameter of 61.3 um, electrode consumption length of 122.3 um, and difference diameter of 5.4 um. As such, the proposed design can effectively improve the overall morphology of the electrode.

關鍵字(中)

★ 向上供給式電化學加工
★ 微圓柱形陣列電極
★ 往復移動
★ 超音波振動輔助

關鍵字(英)

★ Upward jet Electrochemical Machining
★ Micro-Cylindrical Array Electrodes
★ Reciprocating Movement
★ Ultrasonic-Assisted Vibration

論文目次

摘要 i
Abstract ii
目錄 v
圖目錄 ix
表目錄 xiv
第一章緒論 1
1-1 研究背景 1
1-2 研究動機及目的 3
1-3 文獻回顧 5
1-4 論文架構 10
第二章實驗基礎原理 11
2-1 電化學加工基礎理論 11
2-1-1 電化學反應機制 11
2-1-2 法拉第電解定律(Faraday’s Laws of Electrolysis) 12
2-1-3 電化學加工速率 13
2-1-4 平衡間隙 14
2-1-5 歐姆定律(Ohm’s Law) 14
2-1-6 電極電位-金屬與溶液界面雙電層理論(Electrical Double Layer Theory) 15
2-1-7 陽極極化曲線及其特徵 16
2-1-8 電流密度與電流效率 18
2-1-9 脈衝占空比 19
2-2 超音波原理 20
2-2-1 泵吸作用(Pumping Effect) 20
2-2-2 空蝕作用(Cavitation) 20
2-2-3 超音波振動電極之運動分析 21
2-3氣泡影響電化學加工之理論(氣泡與導電度關係理論) 24
2-3-1 體積分率(Volume Fraction) 24
2-3-2 導電度(Electrical Conductivity) 24
第三章實驗設備與材料 26
3-1 實驗簡介 26
3-2 實驗設備 27
3-2-1 電化學加工機 27
3-2-2 去離子水系統 28
3-2-3 電子天平 29
3-2-4 電磁式加熱攪拌器 30
3-2-5 線切割放電加工機 31
3-2-6 CNC高速雕銑機 31
3-2-7 高精度四軸CNC微放電加工機 32
3-2-8 超音波主軸與發振器 33
3-2-9 超音波振幅量刀器 34
3-2-10 直流脈衝電源供應器 34
3-2-11 示波器 35
3-2-12 超音波洗淨機 35
3-2-13 顯微影像量測系統 36
3-2-14 立體電子顯微鏡 37
3-2-15 掃描式電子顯微鏡(Scanning Electron Microscope，SEM) 37
3-3 實驗材料 38
3-3-1 陣列孔洞銅片 38
3-3-2 HSS矽鋼片 38
3-3-3 一體式方形陣列電極 39
3-3-4 電解液 40
3-4 實驗流程與方法 41
3-4-1 電解液調配 43
3-4-2 一體式方形陣列電極準備 43
3-4-3 具陣列孔洞刀具電極製作 44
3-4-4 超音波振幅量測 44
3-4-5 實驗架設參數設定 46
3-4-6 超音波振動輔助電化學加工製備微圓柱形陣列電極之加工流程 47
3-4-7 實驗結果量測與觀察 49
3-4-7-1 微圓柱形陣列電極量測 49
3-4-7-2 電極極針平均直徑 (Average Diameter) 49
3-4-7-3 電極整體平均直徑與全距(Average Diameter and Range of Electrode) 50
3-4-7-4電極極針平均消耗長(Average Consumption Length) 51
3-4-7-5電極整體消耗長與全距 (Consumption Length and Range of Electrode) 52
3-4-7-6電極整體直徑差 (Diameter Difference) 52
第四章結果與討論 55
4-1 COMSOL加工區域電場分析 55
4-2 CFD加工區域流場與流速分析 56
4-3 不同輔助方法(向下噴流、向下噴流與超音波複合、向上噴流、向上噴流與超音波複合)對電化學製備微圓柱形陣列電極之影響 58
4-4 加工時間對電化學製備微圓柱形陣列電極之影響 67
4-5工作電壓對電化學製備微圓柱形陣列電極之影響 75
4-6 脈衝休止時間對電化學製備微圓柱形陣列電極之影響 83
4-7 超音波功率等級對電化學製備微圓柱形陣列電極之影響 92
4-8 陣列微孔加工實驗 105
第五章結論 109
未來展望 113
參考文獻 114

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指導教授

崔海平(Hai-Ping Tsui)

審核日期

2022-8-30

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