製備銀奈米粒子/多孔隙矽晶奈米線/矽晶微米孔洞異質結構及其水蒸發發電特性之研究

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姓名

陳泓賓(Hung-Ping Chen) 查詢紙本館藏

畢業系所

化學工程與材料工程學系

論文名稱

製備銀奈米粒子/多孔隙矽晶奈米線/矽晶微米孔洞異質結構及其水蒸發發電特性之研究

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摘要(中)

本研究以兩步驟金屬輔助化學蝕刻法，成功地在N-type(001)晶面之矽單晶基材上製備出具備高深寬比、大面積準直型矽晶奈米線結構，再由去離子水來驗證水蒸發發電之趨勢變化及發電機制。除此之外，又進一步利用酸性橫向蝕刻法製備多孔隙矽晶奈米線結構，多孔隙矽晶奈米線結構相較於矽晶奈米線結構擁有更優異之比表面積性質，並透過水蒸發發電量測之結果證明其可大幅提升對於水蒸發發電元件之性能，再透過無電鍍披覆技術將銀奈米粒子以網絡狀的形式均勻披在多孔隙矽晶奈米線結構上，網絡狀之銀奈米粒子電極能夠擁有良好收集電荷的能力。銀奈米粒子/多孔隙矽晶奈米線結構之水蒸發發電元件在一般環境進行量測輸出電壓及輸出電流。最後，將具有最佳製程條件直接與薄化矽單晶基材結合。
本研究以一步驟金屬輔助化學蝕刻法成功製備出均勻薄化之矽單晶基材，再透過上述之最佳製程條件製備出可撓曲銀奈米粒子多孔隙矽單晶奈米線結構，並展現出十分優秀的可撓曲性質，可應用於不同彎曲程度之水蒸發發電。
為克服水源無法源源不絕供給之問題，本研究以多步驟金屬輔助化學蝕刻法成功製備出於均勻薄化之矽單晶基材背面製備矽晶微米孔洞結構，正面再結合上述製備銀奈米粒子多孔隙矽單晶奈米線之最佳製程技術製備出可撓曲銀奈米粒子多孔隙矽單晶奈米線/矽晶微米孔洞異質結構，能夠使液體由下往上輸送，能夠不再需要透過間歇性補水之方式，將其置於含有水之液面上，可透過毛細作用力將水導入置本實驗結構之上，藉此達到長時間發電，達到水蒸發發電元件之性能優化。

摘要(英)

This study successfully fabricated vertically aligned silicon nanowire structures with high aspect ratios and large areas on N-type (001) silicon substrates using a two-step met-al-assisted chemical etching method. The trend and mechanism of electricity generation from water evaporation were verified using deionized water. Furthermore, porous silicon nanowire structures were fabricated using an acidic lateral etching method. Compared to silicon nanowire structures, the porous silicon nanowire structures exhibited superior spe-cific surface area properties. The measurement results of electricity generation from water evaporation demonstrated that these structures significantly enhanced the performance of water evaporation power generation devices. Additionally, by employing an electroless plating technique, silver nanoparticles were uniformly coated in a network form on the porous silicon nanowire structures. The networked silver nanoparticle electrodes exhibited excellent charge collection capabilities. The water evaporation power generation device with silver nanoparticle-coated porous silicon nanowire structures was measured for output voltage and current in a general environment. Finally, the optimized process conditions were directly combined with the thinned silicon substrate.
This study also successfully fabricated uniformly thinned silicon substrates using a one-step metal-assisted chemical etching method. Using the aforementioned optimized process conditions, flexible silver nanoparticle-coated porous silicon nanowire structures were prepared, demonstrating excellent flexibility. These structures can be applied to wa-ter evaporation power generation under various bending conditions.
To address the issue of continuous water supply, this study successfully fabricated silicon micro-pore structures on the back of uniformly thinned silicon substrates using a multi-step metal-assisted chemical etching method. On the front side, the optimized pro-cess technology for fabricating silver nanoparticle-coated porous silicon nanowires was applied, resulting in flexible silver nanoparticle-coated porous silicon nanowire/silicon micro-pore heterogeneous structures. These structures can transport liquid from bottom to top, eliminating the need for intermittent water replenishment. By placing the structure on a liquid surface containing water, capillary action can draw water into the experimental structure, enabling long-term power generation and optimizing the performance of water evaporation power generation devices.

關鍵字(中)

★ 矽晶奈米線
★ 水蒸發發電
★ 可撓曲矽晶基材

關鍵字(英)

論文目次

目錄
第一章前言文獻及回顧 1
1-1前言 1
1-2摩擦奈米發電機 4
1-2-1摩擦起電效應 5
1-2-2固-固摩擦奈米發電機 5
1-2-3液-固摩擦奈米發電機 6
1-2-4增進產電裝置性能之方法 8
1-3現今各式材料應用於水蒸發誘導產電 11
1-3-1碳基材料 11
1-3-2高分子材料 12
1-3-3固體氧化物 13
1-3-4金屬衍生物 13
1-3-5非金屬半導體材料 14
1-4水蒸發發電元件之應用 15
1-4-1直接供給能源 15
1-4-2自供電傳感器 16
1-5薄化可撓曲矽晶元件 16
1-5-1薄化可撓曲矽晶元件之應用領域 17
1-5-2薄化可撓曲矽晶元件之製程技術 17
1-6研究動機及目標 19
第二章實驗步驟及儀器設備 22
2-1實驗步驟 22
2-1-1矽單晶基材使用前處理 22
2-1-2兩步驟金屬輔助化學蝕刻法製備準直型矽晶奈米線結構 23
2-1-3酸性橫向蝕刻法製備多孔隙準直型矽晶奈米線結構 23
2-1-4無電鍍銀奈米粒子技術披覆多孔隙準直型矽晶奈米線結構 23
2-1-5塗佈光阻結合金屬輔助化學蝕刻法、鹼性蝕刻法及酸性蝕刻法製備矽晶微米孔洞結構 24
2-1-6一步驟金屬輔助化學蝕刻法製備均勻薄化矽單晶基材 24
2-1-7可撓曲貴金屬銀奈米粒子/多孔隙準直型矽晶奈米線/矽晶通道異質結構之製備 25
2-2水蒸發發電元件之製備 25
2-2-1矽晶奈米線結構上製備氧化層 25
2-2-1-1原生氧化層(native oxide) 25
2-2-1-2氧氣電漿氧化層(plasma oxide) 26
2-2-2微型發電元件之設計及電極選擇 26
2-3試片分析 27
2-3-1掃描式電子顯微鏡 27
2-3-2穿透式電子顯微鏡 27
2-3-3影像式水滴接觸角量測儀 28
2-3-4光熱效應量測系統 28
2-3-5水蒸發發電元件量測系統 28
第三章結果與討論 30
3-1製備準直型矽晶奈米線陣列結構 30
3-1-1準直型矽晶奈米線陣列結構之製備 30
3-1-2多孔隙準直型矽晶奈米線陣列結構之製備 31
3-1-3無電鍍貴金屬銀奈米粒子披覆多孔隙準直型矽晶奈米線陣列結構之製備 33
3-2準直型矽晶奈米線微型發電元件之發電特性分析 33
3-2-1準直型矽晶奈米線陣列微型發電元件之設計 34
3-2-2各式氧化製程準直型矽晶奈米線微型發電元件 34
3-2-3不同長度之準直型矽晶奈米線之水蒸發發電性能分析及發電機制 35
3-2-4矽晶奈米線結構水蒸發發電元件串並聯測試 37
3-2-5多孔隙矽晶奈米線之水蒸發發電性能分析 37
3-2-6銀奈米粒子/多孔隙矽晶奈米線之水蒸發發電性能分析 38
3-2-7面積改變對於矽晶奈米線之水蒸發發電性能分析 38
3-2-8強制對流對於矽晶奈米線之水蒸發發電性能分析 39
3-2-9模擬光照對於矽晶奈米線之水蒸發發電性能分析 39
3-3可撓曲矽單晶基材上製備準直型矽晶奈米線結構 40
3-3-1薄化矽單晶基材之製備 40
3-3-2可撓曲銀奈米粒子/多孔隙準直型矽晶奈米線結構之製備 41
3-4可撓曲銀奈米粒子/多孔隙準直型矽晶奈米線/矽晶微米孔洞異質結構之製備及其水蒸發發電之性能分析 42
3-4-1光阻塗佈結合金屬輔助化學蝕刻法、鹼性蝕刻法及酸性蝕刻法製備矽晶微米孔洞結構 42
3-4-2製備可撓曲銀奈米粒子/多孔隙準直型矽晶奈米線/矽晶微米孔洞異質結構及其水蒸發發電性能分析 43
3-5可撓曲水蒸發發電元件之實際應用測試 44
第四章結論與未來展望 45
4-1結論 45
4-2未來展望 46
參考文獻 47
表目錄 55
圖目錄 57

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指導教授

鄭紹良

審核日期

2024-8-21

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