本論文主要研製可應用於微波光子通信系統之V頻段(50-75 GHz)與W頻段(75-110 GHz)積體漸進式開槽天線(tapered slot antennas)。在天線設計方面透過三種方法，分別為皺摺邊緣結構(corrugated edges)、蝕刻部份基板、蒸鍍週期性金屬條結構於蝕刻後之基板背面，改善製作於較厚基板上該類天線遠場特性。此外，基於量測與實際應用考量，透過所設計之V頻段與W頻段共平面波導(coplanar waveguide,CPW)至槽線轉接器，將天線饋入方式轉成CPW型式。在天線實作方面，使用半導體製程方法包括黃光微影、薄膜沉積、蝕刻技術、晶片研磨與拋光等技術實現此天線，並透過量測驗證模擬結果。最後，將天線與所設計之共平面波導帶通濾波器結合而成一天線模組，並分析該天線模組之特性。 In this thesis, novel V-band (50-75 GHz) and W-band (75-110 GHz) linear tapered slot antennas (LTSAs) that can find applications in microwave photonic communication systems are proposed and developed. In contrast to the traditional approach, the proposed LTSAs can be fabricated on electrically thick substrates without characteristics deterioration via the following avenues, viz. the corrugated side edges, the grooved substrate, and the periodic metal strips imprinted on the grooved substrate. Regarding its compatibility with measurement facilities and integrated circuits, the antenna feeding structure is transformed from the slotline (SL) to coplanar waveguide (CPW) through a SL to CPW transition. The proposed CPW-fed LTSAs are fabricated on silicon substrates via the monolithic integrated circuit processes, such as photolithography, thin film deposition, and wet etch. The measurement results are compared against the simulation results for design verification. Finally, V-band and W-band CPW filters are proposed and integrated with the LTSAs. The simulation results of the integrated antenna modules are demonstrated.
