本篇論文研究的主題為探討鋁電解電容器用陽極鋁箔在電化學蝕刻時所產生之腐蝕反應,並藉由腐蝕反應的變化來觀察其對電蝕箔最終性能之影響。內容包含有高壓陽極箔之直流電蝕及低壓陽極箔之交流電蝕的研究。 實驗首先利用ICP-AES來分析高壓陽極箔及低壓陽極箔內所含之微量元素,確定其元素種類及含量,以便後續之研究。分別依照探討之主題來控制不同的電蝕參數,實際電蝕高壓陽極箔及低壓陽極箔,之後再按照EIAJ的規範對電蝕箔做化成處理,並量測其靜電容量與重量損失率。利用光學顯微鏡(OM)及掃描式電子顯微鏡(SEM)來觀察電蝕箔之截面腐蝕形態及表面的腐蝕孔洞分佈情形。藉由這些分析方法,來比較不同電蝕參數所造成之腐蝕組織對鋁電解電容器用陽極鋁箔之靜電容量的影響。 在電化學分析方面,藉由電化學分析儀(potentiostats /galvanostats for electrochemical research)來觀察不同電蝕條件下電位及電流變化之情形。藉由電位或電流的變化,可判斷在各種條件下,腐蝕反應進行的情形,再配合靜電容量及重量損失率之量測與腐蝕狀況之實際觀察,可對鋁電解電容器用陽極鋁箔之腐蝕舉動做最完整之探討。 由實驗結果得知:高壓陽極箔之前處理濃度愈高,在電蝕時形成之腐蝕孔洞會愈細密,而若在前處理溶液中添加微量元素,則可使得腐蝕孔洞明顯變大;在低壓電蝕方面,若電蝕頻率愈高,所形成之腐蝕孔洞愈小,而當溫度增加時,要達到最佳靜電容量之頻率也必須跟著升高。 Electrochemical etching of high purity aluminum foils is widely used in the manufacture of electrolytic capacitor electrodes. In this paper, the electrochemical behavior of high purity aluminum foils in hydrochloric acid has been studied. Effects of etching factors could be observed by the research of electrochemical behavior. The contents of this paper included the DC-etching for high voltage aluminum foils and the AC-etching for low voltage aluminum foils. The chemical compositions of high purity aluminum foils were determined before etching by using the analysis of ICP-AES. According to the selected parameters of electrochemical etching, the aluminum foils have been etched, and the capacitance was measured under EIAJ specifications. For surface and cross section morphology studies, the samples were examined in the SEM and OM, respectively. The methods of chrono-potentiometry and galvanostatic cyclic voltammetry were applied to obtain the voltage-time and voltage-current curves by using a potentiostats/galvanostats. From the observation of etched microstructure and the electrochemical analysis, the effect of etching factors on the etching behavior of high purity aluminum foils could be studied in detail. In the results of experiments, it was found that the more concentrated pretreatment solution, the finer etched pits of high voltage aluminum foils. And the trace elements in pretreatment solution could coarsen the pits obviously. The size of etched pits fined with increasing frequency in AC-etching. When the temperature of etchant increased, the frequency that performed excellent capacitance must be raised.