由於LCD旋塗所用之感光染料價格非常的昂貴;所以若能減少感光染料的塗佈量及生產時間,必能使LCD生產成本大量的減低和生產效率提高,這也是本研究的重要目的。目前LCD製程主要是以旋轉塗佈(Spin Coating)方式將感光染料塗佈於基板上。本實驗所使用的狹縫式塗佈模式與以往使用在矽晶圓上的塗佈模式大不相同。所以在塗佈的過程中其液膜的擴展情形及液動不穩定之機制是非常值得探討的。在狹縫式塗佈中,可塗佈的視窗是狹小的,同時會有需多的缺陷,如肋形紋(ribbing)、溪狀(rivulet)、耙形線(rake line),本實驗利用此新式的狹縫式塗佈機台求得LCD於狹縫塗佈時之塗佈注入量、塗佈間距(coating gap)、狹縫間距(slot gap)、不同流體對完整覆膜的影響,並配合狹縫頭的設計,進而找出最佳注液模式,使感光染料減量及塗佈的更加均勻。如此不但可節省製程成本,更可製造出品質完美之LCD,並提供業界作為製程提升之參考。 Abstract Reduction of the usage of dye material is one of the key factors for the cost reduction for LCD since the dye material is quit expensive .Slot die coating is widely used and distinct from the spin coating using in semiconductor relating manufacture processes. As above, dye material is spread on the base plate of LCD. In proceeding of spinless , mechanisms of thin film spread and unsteady mobility can be inspected definitely for techniques enhancement. By this research, a novel slot coating apparatus will be employed to figure the coating volume, coating gap, slot gap, and the effect of fully developed thin film with diverse liquids due to the defects, ribbing, rivulet, and rake line accused in the coating window. With a design of slot die, the dye material reduction and uniform coating will be improved from the achieved optimum coating. Eventually, the promotion of cost down in manufacture and high quality in LCD would be adopted in institute fields.