In this study, super-hydrophobic films were deposited in a one-step simple process by pulsed RF C6F6 plasma, and the influence of the duty-cycle (DC) on the surface structure and chemical characteristics of depositing fluorocarbon films was examined. The deposited coatings were analyzed by X-ray Photoelectron Spectroscopy (XPS), Fourier Transform Infrared Spectrometry (FTIR), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Contact Angle Analyzer. It was found that by decreasing the DC from 1 to 0.1, the rough structure of the film with a lot of particles was obtained. In addition, the superhydrophobic property was obtained on this composite fluorocarbon film. Finally, the adhesion of fluorocarbon films could be increased by deposited on the cotton fiber substrates instead of Si wafer. (c) 2008 Elsevier B.V. All rights reserved.
