Effects of thermal annealing on titanium oxide films prepared by ion-assisted deposition

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题名:	Effects of thermal annealing on titanium oxide films prepared by ion-assisted deposition
作者:	Jaing,CC;Chen,HC;Lee,CC
贡献者:	光電科學研究所
关键词:	THIN-FILMS;OPTICAL-PROPERTIES;RESIDUAL-STRESS
日期:	2009
上传时间:	2010-06-29 19:41:17 (UTC+8)
出版者:	中央大學
摘要:	Titanium oxide thin films are prepared at a substrate temperature of 250 A degrees C by electron-beam evaporation and ionassisted deposition. The effects of thermal annealing temperatures from 100 to 450 A degrees C on the optical and mechanical properties are studied. The optical and mechanical properties include refractive indices, extinction coefficients, residual stress, surface roughness and crystallization. Experimental results show these properties of titanium oxide films clearly depend on the thermal annealing process.
關聯:	OPTICAL REVIEW
显示于类别:	[光電科學研究所] 期刊論文

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