Paired circularly polarized heterodyne ellipsometer

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/28130

Title:	Paired circularly polarized heterodyne ellipsometer
Authors:	Yu,CJ;Lin,CE;Yu,LP;Chou,C
Contributors:	光電科學研究所
Keywords:	PHASE MODULATION;ZEEMAN LASER;LIGHT;ANALYZER
Date:	2009
Issue Date:	2010-06-29 19:42:12 (UTC+8)
Publisher:	中央大學
Abstract:	We develop a paired circularly polarized heterodyne ellipsometer (PCPHE), in which a heterodyne interferometer based on a two-frequency circularly polarized laser beam is set up. It belongs to an amplitude-sensitive ellipsometer that is able to provide not only a wider dynamic range of polarization modulation frequency but also a higher detection sensitivity than that of a conventional photometric ellipsometer. A real-time and precise measurement of ellipsometric parameters, which demonstrated an accuracy of less than 1 nm on thickness measurement of SiO2 thin film deposited on silicon substrate, can be applied with the PCPHE. (C) 2009 Optical Society of America
Relation:	APPLIED OPTICS
Appears in Collections:	[Graduate Institute of Optics and Photonics] journal & Dissertation

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