Self-calibration of a phase-shifting adapter for Fizeau interferometers

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题名:	Self-calibration of a phase-shifting adapter for Fizeau interferometers
作者:	Ouyang,Y;Ou-Yang,M;Chou,HC
贡献者:	光電科學研究所
日期:	2009
上传时间:	2010-06-29 19:42:33 (UTC+8)
出版者:	中央大學
摘要:	Phase-shifting interferometers with three piezoelectric transducers (PZTs) on their phase-shifting adapter (PSA) are widely used in precision measurement. The guarantee of the PSA to stretch as a flat is very important to the accuracy of the measurement. In this paper, we propose a systematic self-calibration method to calibrate the different displacements of the PZTs so that the PSA can be moved evenly as a flat. The proposed method uses only the interference patterns to calibrate the three PZTs and information about the exact position of the PZTs and the instrument parameters of the interferometer are not required. Experimental results show that, after calibration by the proposed method, the deviation of the measured phase shift error could be reduced about 43.1 times from 3.492 to 0.081A degrees.
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显示于类别:	[光電科學研究所] 期刊論文

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