Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/28157

Title:	Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry
Authors:	Wang,SF;Chiu,MH;Chen,WW;Kao,FH;Chang,RS
Contributors:	光電科學研究所
Keywords:	RESOLUTION
Date:	2009
Issue Date:	2010-06-29 19:42:41 (UTC+8)
Publisher:	中央大學
Abstract:	A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0.417 nm. The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated. (C) 2009 Optical Society of America
Relation:	APPLIED OPTICS
Appears in Collections:	[Graduate Institute of Optics and Photonics] journal & Dissertation

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