本論文主旨在於:自含鎳離子之乙二醇或尿素之氯化膽鹼離子液體鍍浴系統中,利用微陽極導引法進行鎳金屬之微電鍍研究。藉由改變析鍍參數(如: 溫度、偏壓、微陽極之起鍍間距、鍍液成分、硼酸的添加與否)等,討論其對析鍍行為之影響,除了以掃描式電子顯微鏡觀察析鍍物之形貌外,進一步利用析鍍電流監測,以及採用有限元素法之電場模擬等資料,從電場強度、電荷交換及質傳速率等差異,來理解離子溶液中微電鍍鎳之行爲。 隨著溫度提升,導致鍍液黏度下降及離子擴散係數提高,使鍍浴中質傳效果增高。改變鍍浴成份時(提高鍍液中之乙二醇比例),將可提升鍍浴導電率,增大析鍍電流,因而加速電荷之交換。微陽極之起鍍間距增加,會導致電場強度減弱,降低析鍍電流,減緩電荷交換速率。偏壓增加則會提高電場強度,增高析鍍電流,加速電荷交換。添加硼酸則可防止因鍍浴pH升高,而在析鍍時生長出氫氧化鎳。 Micro-anode guided electroplating (MAGE) of nickel from the bath of ionic liquid system such as choline chloride, including choline chloride/urea and choline chloride/ethylene glycol, has been investigated. Experimental parameters such as bath temperature, electrical bias, gap between two electrodes, mole ratio of ethylene glycol to choline chloride in the bath, addition of boric acid in the bath were concerned to explore their influence on the morphology of the Ni-deposit. Electron scanning microscopy (SEM) was used to examine the morphology of the deposits. The current in the depositing process was monitored. Finite element analysis was employed to comprehend the electroplating mechanism of MAGE in the ionic liquid system by virtue of electric field strength, electron transfer process and the rate of mass transfer. With increasing bath temperature, the viscosity of the electrolyte decreased. The decrease of viscosity results in diffusion enhancement of the electro-active species thus facilitating their mass transport. The conductivity of the system was found to increase with increasing the ratio of ethylene glycol to choline chloride in the bath. The strength of electric field will reduce if the initial gap between the electrodes is extended or less electrical bias was employed. The bath involved boric acid tends to maintain a constant pH value and the possible formation of nickel hydroxide could be prevented.