Interfacial reactions of 2-D periodic arrays of Ni metal dots on (001) Si

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Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/30241

Title:	Interfacial reactions of 2-D periodic arrays of Ni metal dots on (001) Si
Authors:	Cheng,S. L.;Lu,S. W.;Chen,H.
Contributors:	化學工程與材料工程研究所
Keywords:	ELECTRON-BEAM LITHOGRAPHY;NANOSPHERE LITHOGRAPHY;EPITAXIAL-GROWTH;NANOWIRES;FABRICATION;SILICIDE;PHASE;TRANSFORMATION;MECHANISM;CRYSTALS
Date:	2008
Issue Date:	2010-07-06 16:15:17 (UTC+8)
Publisher:	中央大學
Abstract:	The fabrication of 2-D periodic arrays of nickel metal dots using polystyrene (PS) nanosphere lithography and the interfacial reactions of the Ni dot arrays on (0 0 1) Si substrates after different heat treatments have been investigated. The epitaxial NiS
Relation:	JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
Appears in Collections:	[National Central University Department of Chemical & Materials Engineering] journal & Dissertation

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