Fabricating a hollow optical waveguide for optical communication applications

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35309

Title:	Fabricating a hollow optical waveguide for optical communication applications
Authors:	LO Shih-Shou;CHEN Chii-Chang;HSU Shih-Chieh;LIU Cheng-Yi
Contributors:	光電科學與工程學系
Keywords:	CRYSTALLINE SILICON;ALKALINE-SOLUTIONS
Date:	2006
Issue Date:	2010-07-07 14:10:00 (UTC+8)
Publisher:	中央大學
Abstract:	This work demonstrates a direct amorphous Si low-temperature wafer bonding technique to fabricate a semiconductor hollow waveguide with onmi-directional reflectors for use in near infrared applications. The 2% dilute KOH solution was used to bond two ODR
Relation:	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Appears in Collections:	[光電科學與工程學系] 期刊論文

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