Micro-anode guided electroplating (MAGE) control system

NCUIR > Engineering College > Graduate Institute of opto-Mechatronics > journal & Dissertation > Item 987654321/36126

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/36126

Title:	Micro-anode guided electroplating (MAGE) control system
Authors:	Lee DL,Lin JC,Kao PF,Jiang SB
Contributors:	光機電工程研究所
Keywords:	LOCALIZED ELECTROCHEMICAL DEPOSITION;MICROFABRICATION;MICROSTRUCTURES
Date:	2006
Issue Date:	2010-07-08 09:43:25 (UTC+8)
Publisher:	中央大學
Abstract:	This article releases the details of the equipment development for the micro-anode guided electroplating MAGE fabrication. The microstepping architecture, electroplating power source, control system architecture, measurement system, man machine interface
Relation:	PROGRESS ON ADVANCED MANUFACTURE FOR MICRO/NANO TECHNOLOGY 2005, PT 1 AND 2
Appears in Collections:	[Graduate Institute of opto-Mechatronics] journal & Dissertation

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