矽晶太陽能電池製程中利用網版印刷製作金屬電極的方式來生產太陽電池，為了提高電池本身的效率，由原本的一次電極塗佈改良為兩次電極塗佈，原來較寬的電極變較窄而且高度較高。傳統一次塗佈精度要求不高，而兩次塗佈產生對位誤差使得兩層電極發生錯位問題將是轉換效率提升的關鍵因素，因此本研究針對兩次塗佈電極之檢測及補正流程，發展多項技術，包括：影像處理技術、誤差比對技術、塗佈機台控制介面、檢測系統整合等，並導入檢測資料庫，發展影像特徵對位演算法，將兩次塗佈電極對位誤差降至50 μm內。本研究規劃五種不同實驗以驗證各種精度，包括：軟體運算精度分析、電極塗佈機台塗佈重現性分析、軟體座標與塗佈機台座標轉換誤差分析、單次電極塗佈補正分析和兩次電極塗佈補正分析，實驗結果驗證本研究所發展影像檢測與精度補正方法的可行性。 The screen printed metallization process is one of the standard manufacturing processes for the production of silicon solar cells. To enhance the efficiency of the solar cell, a technology for dual layers of electrode printing is developed, which increases the height of the electrode, while reduce its width. Traditionally, the electrode on the wafer is printed once and its width should be long enough in order to keep a certain amount of cross-sectional area. However, the misalignment of two layers of electrode is a significant problem for such a new process. The objective of this research is to develop an image-based inspection and compensation technology for dual layers of electrode printing. Several techniques are developed for the inspection and compensation of the errors, including image processing, error comparison, control and interfacing with the printing machine and integration with the inspection system. The goal of the proposed system is to reduce the error to 50 μm. Five different sets of experiments are conducted and experimental results are analyzed to verify the feasibility of the proposed system.
