本研究利用奈米球做為光波導， 我們利用有限時域差分法 (Finite-Difference Time-Domain)設計光波導與轉彎結構，並觀察波導元件中 的電磁波傳播行為的變化，並算出傳遞損耗與轉彎損耗；在元件製作方面， 嘗試以微影蝕刻技術做出理想的奈米球光波導與轉彎結構。本論文與檢測 奈米球鋪排缺陷。亦研究奈米球鋪排缺陷檢測，我們針對有缺陷的奈米球 鋪排表面之繞射圖形，以快速傅立葉轉換(Fast Fourier Transform)為基礎， 對於不同種類缺陷做分析，最後得出奈米球鋪排之缺陷比例。 In this thesis, we study the optical waveguide component formed by nanospheres The design of optical waveguide components and bending waveguide structure are calculated by the finite-difference time-domain (FDTD) method. We calculate the unit transmission loss and bending loss. We tried to realize the nanosphere waveguide by photolithography and etching process. Finally, the defect density in the monolayer of nanospheres was examined. We used fast Fourier transform (FFT) analysis to the diffraction pattern of the monolayer of nanospheres. This method can be used to estimate defect density.
