中大機構典藏-NCU Institutional Repository-提供博碩士論文、考古題、期刊論文、研究計畫等下載:Item 987654321/46510
English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 78937/78937 (100%)
造访人次 : 39610455      在线人数 : 116
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/46510


    题名: 迴力棒等效性:均勻分佈晶圓圖之分類器;Boomerang Equivalence:A Classifier for Uniform Wafer Maps
    作者: 廖仁男;Jen-nan Liao
    贡献者: 電機工程研究所碩士在職專班
    关键词: 晶圓圖;迴力棒;分類器;wafer map;Boomerang;classifier
    日期: 2010-12-08
    上传时间: 2011-06-04 16:18:04 (UTC+8)
    出版者: 國立中央大學
    摘要: 本篇論文提出統計分割群聚演算法量化晶圓圖的瑕疵圖樣,並提出均勻分佈之瑕疵圖樣的特性為一迴力棒圖(Boomerang-Chart)。 在兩種晶圓圖格式比較上,瑕疵圖樣利用均勻分佈亂數模擬隨機故障導致”雜訊”群聚集。本論文提出Boomerang Equivalence,是一種新的統計分割群聚演算法來預估晶圓圖的平均瑕疵數,利用此演算法可驗證瑕疵圖樣具有可加性。比較亂數模擬法與Boomerang Equivalence法預估的平均瑕疵數,在0.2、0.5與1的平均瑕疵數下,可約有15%、1%與3%的差異。由平均瑕疵數為0.2或為0.5的數片晶圓圖組成平均瑕疵數為1的單一晶圓圖的可加性分析中,亂數模擬法與Boomerang Equivalence法預估的平均瑕疵數差異皆小於2%。 經過驗證,Boomerang Equivalence法可用來判別晶圓圖的瑕疵圖樣是否為均勻分佈,其可加性的特性可於將來探討晶圓圖瑕疵源由並分解成不同瑕疵來源的子晶圓圖樣,提供數理上的可行性。 In this thesis proposes a “statistical partitioning clustering algorithms” to “quantize” the cluster pattern of Wafer Map. The characteristic of cluster pattern in Uniform distribution (simulation) is a Boomerang-Chart. Comparisons on two dataset Wafer Map, the cluster pattern utilizes the uniform random distribution to simulate the random defect induced by the “noise” dataset. In this thesis proposes Boomerang-Equivalence, a new statistical partitioning clustering algorithm, to evaluate the average defect number of Wafer Map. The Boomerang-Equivalence can verify the Additivity property of cluster pattern. Evaluated comparisons of average defect number with random defect simulation and Boomerang-Equivalence, the average defect number in 0.2、0.5 and 1 have the difference of 15%、1% and 3%。 In analysis of additivity property, the single wafer map in average defect number is 1 composed by multi-wafer maps that the average defect number are 0.2 or 0.5, the evaluation difference of average defect number is smaller than 2% compared with random defect simulation and Boomerang-Equivalence. After above verifications, Boomerang-Equivalence can check that a cluster pattern of wafer map is uniform distribution or not. The additivity property can support the reliability of Mathematic theory in finding defect source and decompose the sub-wafer maps in different sources.
    显示于类别:[電機工程學系碩士在職專班] 博碩士論文

    文件中的档案:

    档案 描述 大小格式浏览次数
    index.html0KbHTML958检视/开启


    在NCUIR中所有的数据项都受到原著作权保护.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 隱私權政策聲明