二段陽極處理法應用於鈦薄膜成長之研究; The application of 2-step anodization in Ti thin film growth

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Title:	二段陽極處理法應用於鈦薄膜成長之研究;The application of 2-step anodization in Ti thin film growth
Authors:	陳仲緯;Jun-wei Chen
Contributors:	能源工程研究所
Keywords:	陽極處理;薄膜;二氧化鈦奈米管;anodization;TiO2 nanotube;film
Date:	2011-07-25
Issue Date:	2012-01-05 12:24:53 (UTC+8)
Abstract:	二氧化鈦奈米管陣列具有較大比表面積、穩定物理與化學性質，可應用在光電化學產氫、染料敏化太陽能電池與光觸媒等領域。薄膜製程可依照不同用途，將金屬鍍在不同基板製備出微小元件使應用範圍更函寬廣。本實驗採用射頻濺鍍系統，將鈦薄膜濺鍍於FTO導電玻璃上，放置含有0.25 wt.%氟化銨、3 vol.%水與乙二醇之油性電解液中，固定陽極處理時間改變不同電壓與固定電壓改變不同陽極處理時間，觀察超音波震盪後圖案層(pattern)表面形態變化；而不同超音波震盪頻率對試片會產生不同破壞，導致試片內部殘留應力使試片產生應力腐蝕，應力腐蝕會使二氧化鈦奈米管表面產生裂痕，降低光吸收，導致光電流下降。本研究將超音波震盪頻率提升至110KHz以上，以陽極處理製備出結晶性較佳二氧化鈦奈米管陣列。 The TiO2 nanotube arrays have large surface area, high chemical and physical stability, which are important for many applications such as photo-electrochemical hydrogen generation, dye-sensitized solar cell and catalyst field. According to the different applications, Ti metal will be deposited on different substrates to fabricate micro device to extend application potential of thin film. In this study, we used Radio Frequency (RF) magnetic sputter system to deposit Ti thin film on Fluorine-doped tin oxide (FTO) glass and then anodized in 0.25 wt.%NH4F, 3 vol.%water and ethylene glycol ( EG ) electrolyte solution. We can observe the pattern morphologies due to change of different anodization voltage and anodization time. Different ultrasonic frequency destroyed sample, inducing residual stress to make Stress Corrosion Cracking ( SCC ) begin, which causing absorption and photocurrent of TiO2 nanotube arrays decrease. When the ultrasonic frequency increase above 110KHz, the result showed that the better crystallinity TiO2 nanotube structure have been grown.
Appears in Collections:	[Energy of Mechatronics] Electronic Thesis & Dissertation

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