Optical heterodyne grating shearing interferometry for long-range positioning applications

NCUIR > Engineering College > Graduate Institute of opto-Mechatronics > journal & Dissertation > Item 987654321/49951

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/49951

Title:	Optical heterodyne grating shearing interferometry for long-range positioning applications
Authors:	Lee,JY;Lu,MP
Contributors:	光機電研究所
Keywords:	DISPLACEMENT MEASUREMENT;RONCHI TEST;ACCURACY;TECHNOLOGY;INPLANE;SYSTEM
Date:	2011
Issue Date:	2012-03-27 16:27:14 (UTC+8)
Publisher:	國立中央大學
Abstract:	We develop a displacement measurement and positioning system with nanometer resolution over the millimeter traveling range The method is based on a heterodyne grating shearing interferometry a homemade lock-in amplifier and a servo control loop for displacement sensing and positioning The quasi-common optical path configuration of our system provides better immunity against environmental disturbances The experimental results demonstrate that our system can measure small and long displacement with nanometric resolution The device achieves a positioning resolution of 23 nm over a traveling range of 20 mm (C) 2010 Elsevier BV All rights reserved
Relation:	OPTICS COMMUNICATIONS
Appears in Collections:	[Graduate Institute of opto-Mechatronics] journal & Dissertation

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