The feasibility of C(3)F(8) abatement via combining nonthermal plasma with adsorption and/or catalysis is investigated in this study. In terms of the simultaneous combination of plasma, adsorption and catalysis (CPAC), three different configurations including A/C layer (adsorbent layer prior to catalyst layer), C/A layer (catalyst layer prior to adsorbent layer) and A/C mixture (adsorbent and catalyst are mechanically mixed) are adopted. For all the experimental tests conducted in this study, the gas stream consists of 500 ppm C(3)F(8), 2% O(2), and balanced N(2). The experimental results indicate that C(3)F(8) removal efficiencies depend on what kind of packing material is adopted (adsorbent, catalyst or both) and how the material is packed within the plasma reactor. The removal efficiencies obtained with different reactors are in the order as: CPAC (A/C layer; AC mixture) > CPA (plasma with adsorbent alone) > CPC (plasma with catalyst alone) > CPAC (C/A layer). The indentified products after treatment include CO(2), CO, N(2)O and CF(4). The formation of C(2)F(6) is not observed in this study, which is encouraging since the global warming potential of C(2)F(6) is actually higher than that of C(3)F(8).