Optical properties and residual stress in aluminum nitride films prepared by alternating-current dual reactive magnetron sputtering

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题名:	Optical properties and residual stress in aluminum nitride films prepared by alternating-current dual reactive magnetron sputtering
作者:	Tang,CJ;Jaing,CC;Lee,KH;Lee,CC
贡献者:	光電科學與工程學系
日期:	2011
上传时间:	2012-03-27 18:16:42 (UTC+8)
出版者:	國立中央大學
摘要:	Aluminum nitride films were deposited by alternating-current dual reactive magnetron sputtering. The influence of different nitrogen flow and working pressures at a sputtering power of 5 kW on the refractive index, extinction coefficient, crystalline structure, residual stress, and surface roughness of aluminum nitride films was discussed. The aluminum nitride film would have high refractive index, low extinction coefficient and small residual stress at suitable nitrogen flow rate and low working pressure. (C) 2011 Optical Society of America
關聯:	APPLIED OPTICS
显示于类别:	[光電科學與工程學系] 期刊論文

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