本研究利用離子交換波導技術製作表面增強拉曼散射之基板及波導試片。利用鋁薄膜當作還原電極將銀離子還原於波導兩側,二階段離子交換製程更進一步加強銀離子的還原,增加填充率,並導致吸收波長紅移。利用氫氟酸蝕刻樣品使得銀原子裸露至表面與目標分子R6G更為靠近。拉曼譜的量測證明此系統是具分子指紋辨識性的。Surface enhanced Raman scattering (SERS) active planar and waveguide substrate are fabricated using ion-exchange technique. The Aluminium thin film acts as the electrode which provides electrons assisting the reduction of silver ions alongside the waveguide. The accumulation of silver nano particles can be further enhanced by two step ion exchange technology. The extinction spectrum exhibits a broadened and red-shifted peak indicating that the filling fraction was increased, and the distribution of the particle size and shape are not mono-dispersed. To expose the silver particles so as to place the target molecule in close proximity to the surface, we etched the samples by HF. From the measured Raman spectrum, the finger print of R6G molecule is clearly in evidence.