雙光子聚合(Two-photon Polymerization, TPP)微製造技術由於可製作任意三維外形之微/奈米尺寸級之結構，因而逐漸受到矚目。目前主要的研究，集中在以添加式製造技術中常見的層加工方式(即所謂的2.5維度(2.5dimension)加工方法)來製作微結構。然而TPP微製造是屬於純三維加工技術，理應據此獨特性質發展一套創新方法，來提高製造效率與良率。首先利用實驗室所發展之製造微產品之電腦輔助製造系統產生雷射加工路徑檔案，該系統具有自動切層、規劃加工路徑以及體素大小設定等功能。本論文提出一種創新的想法為體素為基(voxel based)之雷射調整方法，利用高斯光束公式推導出不同能量之體素大小，本論文稱為能量均勻橢圓體，藉由此方法來提高微結構製成效率與品質。其次利用本論文所開發之軟體MicFom來進行雷射加工路徑模擬，研究內容包含能量均勻橢圓體(Energy Uniform Ellipsoid)重疊率之計算、雷射路徑加工模擬、最佳化模擬等。最後利用本實驗室設備製造出幾項微產品，以證明所提出之方式可以有效的提高微結構產品之製成效率與尺寸精準度。 The Two-photon Polymerization (TPP) micro-fabrication technique draws everyone’s attention gradually because of its fabrication capability of arbitrary-shaped and complex three-dimensional (3D) micro/nano-structures. Up to present, most of researches are used the layer-by-layer method, as known as two-and-half-dimensional (2?D) method which is a common manner in additive manufacturing technology, along one specific direction to produce 3D microstructures. However, the TPP micro-fabrication technique can produce microstructures in pure 3D way. This unique characteristic should be taken into account to develop a novel manner for increasing the manufacturing efficiency and yield. The final purpose of this research is developing a 3D and multi-scale (mm/μm/nm) micro-manufacturing method based on TPP micro-fabrication technique. First, a Computer-aided manufacturing (CAM) system with automatic slicing, path planning, voxel setting is developed for manufacturing of micro products by TPP. This paper prove a new way to improve the quality of micro-structure. Second, using the software to simulation the laser paths. Study of research content, including calculate the overlap of energy uniform ellipsoid. Simulation the laser paths. Optimization laser paths. In the end, fabricating micro-structure by TPP to prove that the proposed method can effectively improve the efficiency of micro-structure and size of products made of precision.
