本文研究目的為利用電化學加工將直徑510um的鎢棒製作為螺紋狀微針，希望在利用其做為電化學鑽孔的電極工具時，能增加排屑、排氣泡以及電解液更新。論文中觀察螺紋形成之機制，且探討各加工參數(如：操作電壓、加工時間、陽極旋轉速率、多次加工)，對製作出螺紋狀微電極之影響性。 由實驗結果得知陽極在不同旋轉速率的條件下，量測到的I-V Curve會不相同；極限電流的大小與對應的電壓會隨著陽極旋轉速率提高而增加；在極限電流情形下加工鎢棒會形成螺紋狀微電極，並且螺紋形成長度會隨著轉速變高而變長。生成之螺紋會隨加工時間之拉長而逐漸消失；利用多次加工方法，亦即螺紋生成至一定程度時，將加工電壓降低，使其由電化學拋光變成電化學蝕刻，即可形成較深的螺紋電極；在操作電壓2.6V、加工時間2min、陽極旋轉速率4000rpm情況下加工，得到最佳的螺紋狀微電極。 The purpose of present thesis is to fabricate a thread-like micro-pin, which can be used as the electrode tool in the electrochemical micro-drilling and enhances the removal of dissolved metal, expulsion of producing gases, and recirculation of the electrolyte. The formation mechanism of thread is specially forcused. The influence of working parameters, such as applied voltage, machining time, anode rotating speed, and multiple-step machining, on the fabrication thread-like micro-pin is investigated. Experimental results show that the I-V curves under various anode rotating speeds are different. The limiting current and the corresponding voltage increase as the anode rotating speed increases. The thread can be fabricated under the condition of limiting current, where the electrochemical mechanism is polishing. However, the formed thread will be dimished gradually as the machining proceeds. A multi-step machining method can be applied to enhance the depth of thread. That is, as the thread is formed to a certain stage, a lower voltage is applied such that the electrochemical mechanism is switched to itching, instead of polishing. The thread will thus become deeper. A optimal thread-like micro-pin can be obtained under applied voltage of 2.6 V, machining time of 2 minutes, and anode rotating speed of 4000 rpm.
