本論文是討論複合陣列微米與次微米藍寶石結構對LED出光效率研究，進行實際的實做與分析，設定三個實驗方向 1.有無圖形式否會增加亮度。 2.次微米與微米結構間亮度差異。 3.次微米不同寬高比結構對光萃取效率的影響。 為了解這三種實驗假設的結果，利用奈米壓印技術與乾蝕刻實現所需晶片，為增加實驗結果可靠度，將實驗晶片分兩批磊晶，每組皆投入5種晶片。 實驗一:有圖形亮度提高59%至87%。 實驗二:次微米較微米結構亮度提高10%~18%。 實驗三:實驗片中最大寬高比較最低寬高比亮度會多3%到5%。 ;The study discusses about the complex array and sapphire structure on the LED in an overall light extraction efficiency. The study composed of experiments and analyses. I came out with three experiments.
1. If there are presence of photos or not, it will increase it′s lights. 2.The amount of lightness between submicron and micron structure. 3.The width and height of submicron and how does it influence light extraction efficiency. In order to know about these experiments′ results, I use chips from nano-imprint and dry etching, and I want to increase the reliability of the result of the experiment, so I will separate the chips to two batch of epitaxy. In each group, I distributed five chips. Experiment 1: The chip with a photo increase it′s light 59% up to 87%. Experiment 2: Light in submicron is so higher than in micron by 10% to 18%. Experiment 3: The biggest width and height of the chips are better than the smallest one, more than 3% to 5%.
