本論文提出將 20 Gbps 高頻傳輸線整合於玻璃基光學平台,且和具45°反射面之軟板光波導整合之垂直耦光光路。此高頻傳輸線作為連接垂直共振腔面射型雷射、光偵測器之高頻訊號線。上述元件將整合於玻璃基平台,並且透過下方的高分子聚合物光波導,實現垂直耦和。 玻璃基板上的高頻傳輸線設計,使用共平面波導(coplanar waveguide,CPW)為幾何結構。高頻傳輸線在頻率 50 GHz時,量測到的反射損耗約 -20 dB,插入損耗約-0.24 dB。 軟板的光學傳輸效率,發射端是60%~75%,接收端是40%~60%。而軟板的串音(crosstalks)量測,發射端在 -29 dB之下,接收端在 -25 dB之下。將平行於聚合物波導(polymer waveguide)的方向設為y,和軟板平面平行的設為x,垂直於該平面為z。則發射端光纖的位移容忍度為 -16<z<11, -14<x<10。發射端雷射(VCSEL)出光口的位移容忍度為-13<y<13, -14<x<14,接收端光纖的位移容忍度為-18<z<17, -9<x<9,接收端光檢測器(PD)的收光口位移容忍度是7<y<14, -13<x<14,單位是μm.。 光連接模組的眼圖(eye pattern)量測,發射端(transmitter, TX)在傳輸 10 Gbps時,操作電流需大於等於6 mA.,訊雜比(signal to noise ratio, SNR)才能大於4,四個通道皆同。接收端的四個通道,其眼圖的訊雜比皆大於4,操作電壓為逆向偏壓2 volts。;In the thesis, the high-frequency transmission line is designed and realized on the glass for the connection of vertical-cavity surface-emitting laser (VCSEL) and photo-detector (PD). The optical signal emitting from the VCSEL will out-of-plane couple into the polymer waveguide through the glass substrate and the polymer-based 45°reflector. The measured return loss (S11) and insertion loss (S21) of transmission lines are about -20 dB and -0.24 dB, respectively when the operating frequency is up to 50 GHz. For the optical characteristics of this optical interconnect module, the measured optical coupling efficiency for the transmitter and receiver of the flexible printed circuit board are 75%, and 60 %. The inter-channel crosstalk for both transmitter and receiver can be less than -25dB. The 10-Gbit/s eye pattern with the signal-to-noise ratio (SNR) more than 4 for the optical interconnect module is experimentally demonstrated when the bias current of VCSEL is 6 mA. and when the reverse bias voltage of PD is 2 volts.