本論文提出一種新的共振器耦合器結構,主要利用S型彎曲波導所造成的彎曲損失將能量耦合進入微米小球共振腔,此結構可積體化構裝於Si晶片上具有較佳的機械強度等優點。 在實驗模擬上我們得到與微米小球的耦合效率最高可達35%以上,而實驗的量測上,S型彎曲波導在彎曲半徑為1500微米且彎曲角度為41度時的彎曲損失約為13dB/cm,而在角度為40度時彎曲損失開始明顯上升的趨勢,與利用光束傳播法模擬所得之結果吻合。We have designed and fabricated an S-bend waveguide structure which enables one to excite the Whispering Gallery Modes (WGMs) in microspheres. The highest coupling efficiency found is estimated to be about 35%, and the designed structure has high position and wavelength tolerance. By misplacing the microsphere by 15um only results in 6% coupling efficiency degradation; while 10nm wavelength drift results in 3dB/cm coupling efficiency degradation. Preliminary experimental result shows that the design is in close agreement with the simulation using beam propagation method (BPM). II