近年來隨著環保意識提升，綠能的開發越來越受各國的重視，而熱能本身就是一種存在於日常生活環境的能源。當熱能與電能之間相互轉換時所產生的效應我們稱之熱電效應。熱電元件的應用層面非常廣泛，可以應用於廢熱回收發電或裝置的致冷。 本研究主要利用輕摻雜的矽晶片所蝕刻出的矽奈米線為基底，再對其做N/P-type摻雜，之後進行封裝及串接，量測範圍從室溫到473K，並且探討其熱電模組特性及未來如何去改善。 ;With the increasing environmental awareness, the development of green energy has attracted more and more attention. Heat is a very common energy resource, which can be tailored by thermoelectric effect, a conversion between thermal energy and electric power. Thermoelectric components can be used in wide application, including waste heat scavenging, power generation or IC chip cooling. This work studies the fabrication of silicon-based thermoelectric modules. The doped thermoelectric materials were packaged by UV resin, followed by contact electrode deposition and polishing. After arranging in series, the power was measured from room temperature to 473 K.
