傳統的雙光子聚合(Two-photon Polymerization, TPP)微製造技術藉由體素中較小的徑向尺寸使空間解析度可達到次微米等級。透過積層製造的方法，該技術可製作出任意且複雜外形的微結構。然而TPP微製造技術擁有如此高的空間解析度，勢必要犧牲掉整體的製造速度。對於數百微米高以上的微結構，一旦製造時間拉長，製造失敗的風險也將被大幅提升。對此本研究提出新穎的長軸成形法(Longitudinal Forming Method, LFM)，使用本實驗室開發的四軸微製造系統將玻璃基板旋轉90°，即可採用線掃瞄的方式，利用體素中較長的軸向尺寸快速製造微結構。本研究設計出適用於LFM的基板載台，藉由觀察其製造的微結構外形改進LFM實驗製程。透過固定平台移動速率並改變雷射功率製作微結構，使用掃瞄式電子顯微鏡觀察各結構的尺寸，觀察結果可作為本實驗製造參數的資料庫。本論文最後利用LFM僅需10秒即可製作出高100μm、深寬比16之微結構。;Convention two-photon polymerization(TPP) micro-manufacturing technology could reach high spatial resolution with sub-micro level by the smaller lateral size of a voxel. Through the fabrication mechanism from additive manufacturing, TPP could realize arbitrary and complex shape of micro-structure. Therefore, it must be a trade off between high spatial resolution and total fabrication speed. As fabrication time became longer, risk about structure failure would also be enlarged. To improve this condition, the Longitudinal Forming Method(LFM) was proposed to fabricate micro-structures rapidily. Applying the homemade four-axis micro-manufacturing system allowed the glass substrate to be rotated by 90°, and the longer longitudinal size could be utilized with line scanning method. The appropriate substrate holder were designed, and the shape of structures made by the holders was observed to improve the manufacturing process. Size of structures, fabricated at fixed motion stage speed and different laser power, was measured by Scanning Electron Microscope(SEM), and the database of fabrication parameter was established through the measurement result. Finally, the research spent only 10 seconds realizing the structure with 100μm height and aspect ratio of 16.
