本論文在探討利用微陽極導引電鍍法製備鎳鐵合金三維微米之結構物(微柱與微螺旋)，在電鍍製程中，實驗參數如製程偏壓(4.0V~4.4V)、鍍液pH值(2.1~2.7)與添加劑(抗壞血酸與糖精)等條件，先利用電鍍合金微柱來找出最佳參數，再進行電鍍微螺旋之實驗。對於所得之鎳鐵合金微柱表面形貌、機械性質、防蝕特性以及磁特性之影響。而鎳鐵合金微柱之表面形貌，經由場發射式掃描式電子顯微鏡進行觀察比較；機械性質則利用奈米壓痕試驗儀進行量測；防蝕特性則是將鎳鐵合金微柱浸泡於3.5 wt.% NaCl水溶液中，利用恆電位儀進行電化學試驗比較其腐蝕行為。 而結果顯示，在鍍液添加抗壞血酸與糖精，較低pH值(2.1)與較高製程偏壓(4.2V)所得鎳鐵合金微柱之表面形貌平滑、組織成份均勻；此鎳鐵合金微柱有最低之矯頑磁場(1.7 Oe)以及不錯之飽和磁通密度(196.2 emu/g)，其線性阻抗值與腐蝕電流性能為次佳(4.541×103 A/cm2)、(2.57×10-6 Ohm)，其硬度(4.09 GPa)與楊氏模數(82.1 GPa)皆優於純鎳金屬，故其較為適合最為微螺旋之析鍍參數。 在電鍍微螺旋中，實驗參數有製程參數(重複次數3、4、5)、析鍍角度(20∘、45∘、70∘)，而利用COMSOL Multiphysics模擬軟體進行電場強度之模擬，得到在重複次數越高、析鍍角度越大可以獲得較均勻之線徑。在藉由震動樣品磁度儀進行磁特性分析，得到重複次數5，析度角度為20∘之鎳鐵合金微螺旋有最高之210.6 emu/g，次低之矯頑磁場3.88 Oe。 ;This dissertation discusses the preparation of three-micron microstructures of nickel-iron alloy (micro-column and micro-helix) by continuous microanode electroplating . In the electroplating process, experimental parameters such as process bias (4.0V~4.4V), bath pH (2.1 ~ 2.7) and additives (L-ascorbic acid and saccharin), first use the electroplated alloy microcolumn to find the best parameters, and then carry out the experiment of electroplating micro-helix. The effect of the surface morphology, mechanical properties, corrosion resistance, and magnetic properties of the resulting nickel-iron alloy micro-columns. The surface morphology of the nickel-iron micro-columns was observed and compared via field emission scanning electron microscopy; the mechanical properties were measured using a nanoindentation tester; the corrosion behavior was evaluated by polarization resistance technique in 3.5 wt% NaCl solution.An electrochemical test was performed using a potentiostat to compare the corrosion behavior. The results showed that the surface morphology of the nickel-iron alloy micro-columns obtained at low pH (2.1) and high process bias (4.2V) was smooth and uniform in the plating solution with ascorbic acid and saccharin added. This nickel-iron alloy micro-column has the lowest coercive field (1.7 Oe) and a good saturation flux density (196.2 emu/g). Its linear impedances and corrosion current is second best (4.541×103 A/cm2), (2.57×10-6 Ohm). Its hardness (4.09 GPa) and Young′s modulus (82.1 GPa) are superior to pure nickel metal. It is more suitable for the deposition parameters of the micro spiral. In the electroplated micro-helical, the experimental parameters include process parameters (repetition times 3, 4, 5) and plating angles (20∘, 45∘ , 70∘ ).Simulation of electric field intensity using COMSOL Multiphysics simulation software.It is obtained that the higher the number of repetitions and the larger the plating angle, the more uniform wire diameter can be obtained. Magnetic property analysis by vibrating sample magnetometer. The nickel-iron alloy micro- helix with a repetition number of 5 and a plating angle of 20 has the highest 210.6 emu/g, Second lowest coercive field 3.88 Oe.
