以氮化物磊晶片作為啟發的表面電漿感測元件，不但結構簡單，體積小，材料穩定性高，其內部的氮化銦鎵量子井更可以取代雷射當作激發光源，以達到大面積檢測的效果。 雖然銀搭配藍光氮化物磊晶片產生的表面電漿共振現象可以在光致發光(photoluminescence, PL)光譜上達到很高的增強效果，但銀的不穩定性使得其相關的發展受到了限制與挑戰。本研究中，吾人設計了許多保護銀金屬層的結構，另外同時製程出不同的金屬其退火型態以及各種金屬合金，分別觀察在光譜上的表現與對於折射率變化的靈敏度分析，根據不同的測試結果，我們發現退火過後的銀奈米顆粒與鋁金屬層有較佳的穩定度。 拉曼光譜有別於PL光譜在於在量測樣品上可以在其光譜看到樣品相對應的波峰訊號，本研究將去氧核醣核酸(deoxyribonucleic acid, DNA)分子滴定在氮化物磊晶片上，搭配適當的金屬以達成表面增強拉曼散射的效果，測量其在拉曼光譜上的表現。根據不同濃度的DNA拉曼光譜，以量子井製程的感測元件能得到濃度最低達10-5M的DNA訊號。 ;The surface plasma biosensor built with nitride quantum wells (QWs) is of many advantages, including simplified structure and enhanced sensitivity. Although the surface plasma resonance (SPR) phenomenon induced by Ag on blue-emitting QWs can achieve high enhancement in photoluminescence (PL) spectrum intensity, the instability of Ag hinders the practical applications. In this study, we investigated various structures to stabilize the Ag layer. In addition, we applied different annealing and alloying conditions in the device fabrication. It is found that the Ag annealed at 500 ºC and Al layer can effectively mitigate the oxidation/sulfuration issues of Ag layer. Raman spectroscopy differs from PL spectroscopy in that it can see the corresponding peak signal of the sample in its spectrum on the measured sample. In this study, deoxyribonucleic acid (DNA) molecules were dropped on a micro-roughened QW epi-wafer, and the appropriate metal was used to achieve surface-enhanced Raman scattering (SERS). The SERS spectrum of diluted DNA solutions showed that the characteristic DNA signals can still be observed at the molar concentration down to the 10-5 M.
