近年來，機械手臂逐漸普及於人類生活，因此各項感測元件亦漸受重視。本論文提出了一種新的角度與力-位移即時測量技術。本技術以陰影疊紋原理為基礎，透過所設計的感測片表面結構，搭配疊紋相位移測量的4步相移法，可即時取得感測片上各點的位移資訊。本研究首先根據光柵週期、入射光角度與觀測角設計出具四階結構或斜面結構的感測片，並架設陰影疊紋系統進行位移、角度與力-位移的疊紋拍攝。再將取得的疊紋影像，以Matlab撰寫程式進行位移分析，以驗證此創新構想的可行性。最後，將誤差分析列入考量，討論可能造成預期結果與實驗結果不同之主因。 所提出的技術的優點包括:本技術可大幅減少信號線數目且對電磁波和振動的敏感性低，並且藉由感測片的設計，將傳統陰影疊紋的移相裝置去除。實驗結果顯示，本技術的位移量測系統精密度為6µm，並且可區別出0g~300g的力-位移，擁有10g的解析能力，在本文的最後探討了各種誤差來源。此系統應用層面廣，可架設於自動化工廠中的各類夾具上以即時回饋位移情形。 ;In recent years, mechanical arms come into our life everywhere, such that many kinds of sensors have been developed. This thesis presents a new technique for angular and force-displacement measurement. We improve the traditional shadow moiré system by designing a target surface structure. Combine the 4-step phase shift method and the measurement of moiré shifting, we can obtain the displacement information of the target. Firstly, the targets with the fourth-order structure and the ramped structure are designed according to the effective grating pitch. The shadow moiré system is set up to measure the displacement, angular and force-displacement. The captured image of the moiré will be analyzed by Matlab to verify the feasibility of this innovative concept. Finally, the experimental results and the tolerances were analyzed and discussed. The merits of the proposed technique consist of few signal wires and less susceptibility to electromagnetic waves and vibrations. The experimental results show that the proposed design has good relative relationship between the force and the displacement, leading to various applications, such as tactile sensors.
