| 摘要: | 1980年後在美國支持下韓國、中國大陸、台灣在IC晶片產品引領下，創造了三星、海力士、台積電；時至2019台灣IC產業已佔GDP超過15%；高精密工具機的發展及輔助的機械手臂是最大的功臣，製造業已漸漸普及；滾珠螺桿為其核心機構，隨著不同材料的剛性、行程長短和轉速高低，都造成不同程度的震動，影響加工精度及傳送定位的精準度，而現有精密加工中，對尺寸公差量測已相當足夠；唯獨對動態的量測仍相當缺乏。
本論文提出利用二維感應電場，以非接觸性快速計算表面動態電場對應到表面公差，或轉動中震動的偏差量，作為材料設計機構設計或轉速(使用條件)的重要依據；由量測實驗結果顯示:
(1)滾珠軸承在Y軸震動偏差量大於X軸。
(2)二維電場球形感應探針，可有效量測到滾珠螺桿槽面在動態模擬時的震動偏差量，且不需特殊環境，即可量測到奈米等級尺寸，成本低可靠度高。
(3)二維電場感測裝置確實可以記錄連續位置之電場差及高度差，由於探針不需與工件表面接觸，可避因摩擦衍伸的誤差，或破壞的風險；對工具機性能及可靠度的了解有很大的幫助。
(4)量測到的精度達到奈米級，大大提升量測水準，對未來機構設計以及製程有很大的幫助。
;After 1980, with the support of the United States, South Korea, China, and Taiwan led by IC chip products to create Samsung, Hynix, and TSMC; by 2019, Taiwan’s IC industry has accounted for more than 15% of GDP; the development of high-precision machine tools and The auxiliary robot arm is the biggest contributor, and the manufacturing industry has gradually become popular; the ball screw is the core mechanism. With the rigidity of different materials, the length of the stroke and the speed of the speed, different degrees of vibration are caused, which affects the processing accuracy and the accuracy of transmission and positioning. In the existing precision machining, the dimensional tolerance measurement is quite sufficient; only the dynamic measurement is still quite lacking.
This paper proposes the use of two-dimensional induction electric field to quickly calculate the deviation of the surface dynamic electric field corresponding to the surface tolerance or the vibration during rotation with non-contact, as an important basis for the design of the material design mechanism or the rotation speed (use condition); by the measurement experiment The results show that:
(1) The vibration deviation of the ball bearing on the Y axis is greater than that on the X axis.
(2) The two-dimensional electric field spherical induction probe can effectively measure the vibration deviation of the ball screw groove surface during dynamic simulation, and can measure the nanometer-level size without special environment, low cost and high reliability .
(3) The two-dimensional electric field sensing device can indeed record the electric field difference and height difference of continuous positions. Because the probe does not need to contact the surface of the workpiece, it can avoid the error due to friction and the risk of damage; Knowledge of reliability is of great help.
(4) The measured accuracy reaches the nanometer level, which greatly improves the measurement level, which is of great help to the future mechanism design and manufacturing process. |
