隨著對高品質手機鏡頭的需求量提高,如今小型鏡頭的測試變得越來越重要。對於小型的單一光學元件來說,目前所有的計量設備都難以對單透鏡的定心產生穩定且可靠的測量。而我們實驗室開發了一種高速、高通量的自動化波前像差測量系統來克服這些困難。由於所構建的波前具有極高的動態範圍,因此可以在沒有中繼光學元件的情況下測量到各種不同形狀的透鏡。到目前為止成功測量了像厚彎月面、M形、正彎月面、非對稱雙凹面、平凹面等形狀的鏡片,並且根據不同透鏡形狀因素,測量以兩個表面偏心的量化,達到了約 0.02~0.05 um 的測量可重複性記錄。 有別於其他光學檢測設備,此高動態波前像差測量系統具備量測時間一片5~10秒的速度,無論是重複性或是量測速度,均有達到業界商用標準,改善了現在無法大量檢測的需求。 ;With the increasing demand of high-quality mobile phone lenses, the testing of miniature lenses is becoming more and more critical nowadays. For miniature optics, all the current metrology devices have difficulties to generate a stable and reliable measurement for the centration of single lens. Our laboratory has developed a high-speed, high-throughput automated wavefront aberration measurement system to overcome these difficulties. Owing to the extereme high dynamic range of the wavefront built, different shapes of lenses can be measured without optical nulling. So far, we have successfully measured lenses with shapes like thick meniscus, M-shaped, positive meniscus, asymmetric biconcave, plano-concave and other shapes. Depending on lens shape factor, the measurement quantified in terms of two surface decentration achieving record of measuerment repeatiblilty about 0.02-0.05 um. Different from the other metrology devices, this high dynamic wavefront aberration measurement system has a measurement time of 5~10 seconds for single lens. Both the repeatability and the measurement speed have almost reached the industry standard, which has improved the problem of testing volume lens.