建立與校正產生標準球面波前的五軸精密平台;Establish and calibrate a five-axis precision platform to generate a standard spherical wavefront

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题名:	建立與校正產生標準球面波前的五軸精密平台;Establish and calibrate a five-axis precision platform to generate a standard spherical wavefront
作者:	林亮穎;Lin, Liang-Ying
贡献者:	光電科學與工程學系
关键词:	精密五軸平台;微透鏡陣列;波前檢測器;外差干涉儀;Heterodyne Interferometer;Shack-Hartmann Wavefront Sensor;micro lens array;Fizeau
日期:	2021-08-11
上传时间:	2021-12-07 11:49:23 (UTC+8)
出版者:	國立中央大學
摘要:	本論文描述如何建立並校正一個精密五軸平台，此五軸分別為X、Y、Z、α、β，目的為產生一個五個自由度的標準球面波前，並用於校正Shack-Hartmann Wavefront Sensor 的微透鏡陣列，精準的紀錄點光源位置與波前檢測器之角度，並利用自動化曝光，在波前量測重複性實驗中可以看到每個Hartmann點在多張疊圖質心位置穩定性和單張的穩定性差異將近10倍，在小角度轉動實驗中，斜率精度從單張的7 arc-sec下降至多張疊圖的1 arc-sec。透過微透鏡陣列的校正與HDR曝光提升質心運算精準度，使得Shack-Hartmann Wavefront Sensor可用動態範圍大幅提升。;The content describes how to build and calibrate a precision five-axis platform. The five axes are X, Y, Z, α, β. The purpose is to generate a five-degree-of-freedom standard spherical wavefront, which is used to calibrate the microlens array of the Shack-Hartmann Wavefront Sensor to accurately record the position of the point light source and the angle of the wavefront sensor. Combined with the automatic exposure, in the repeatability experiment of the wavefront sensor, it can be seen that the stability of each Hartmann spot in the centroid position of multiple frames and the stability of a single frame are nearly 10 times different. The slope accuracy of the rotation experiment at a small angle is reduced from 7 arc-sec for a single frame to 1 arc-sec for multiple frames through the HDR algorithm. With the calibration of the micro lens array and HDR exposure to improve the accuracy of centroid calculation, the dynamic range of the Shack-Hartmann Wavefront Sensor has been greatly improved
显示于类别:	[光電科學研究所] 博碩士論文

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