混合式超穎介面於感光元件之應用;Application of meta-pigment-hybrid metasurafce for CMOS imaging sensor

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/88216

Title:	混合式超穎介面於感光元件之應用;Application of meta-pigment-hybrid metasurafce for CMOS imaging sensor
Authors:	林榮勝;Lin, Rong-Sheng
Contributors:	光電科學與工程學系
Keywords:	超穎介面;感光元件;metasurafce;imaging sensor
Date:	2022-06-08
Issue Date:	2022-07-13 19:20:42 (UTC+8)
Publisher:	國立中央大學
Abstract:	本論文將利用金屬介電混合超穎介面對目前感光元件系統進行優化。我們分別優化了感光元件的紅外光濾波元件與感光像素的光學效率。紅外光濾波元件的部分，我們設計了有紅外濾波效果之超穎介面，為金屬介電混合結構，並且與一般紅外光濾波元件使用的有機材吸收材料做結合，而後進行分析。在加上我們設計的超穎介面後，在相同有機吸收材料的使用厚度下，我們將濾波效果波段由850 nm的窄頻，提升至1100 nm，包含了整個矽的能隙範圍。而RGB三個波段的對比度，在有機材料使用厚度1000 nm至300 nm範圍內，提升了2%至11%，從結果來說我們可以減少約100 nm厚的有機材料使用，就達到相似的濾波效果。第二部分為像素光學效率的優化，我們設計了一介電超穎介面，用來優化以拜耳濾色器方式排列的感光元件光學效率。感光元件再加上設計過的超穎介面後，RGB三波段之光學效率增加了90%、24.4%、36%。 ;We optimize the current sensor system using a metal-dielectric hybrid metasurface. We have optimized the optical efficiency of the infrared filter and the optical efficiency of the sensor pixels. For the infrared filter, we have designed a metasurface with an infrared filtering effect, a metal-dielectric hybrid structure, combined it with the organic absorber material used in normal infrared filters, and then analyzed it. With the addition of our design, we have increased the filtering effect from a narrow band of 850 nm to 1100 nm, covering the entire energy gap of silicon, with the same thickness as organic absorber material. The contrast between the three RGB bands has been improved by 2% to 11% over the range of 1000 nm to 300 nm of organic material thickness, which means that we can achieve a similar filtering effect with 100 nm less organic absorber material. The second part is the optimization of the pixel optical efficiency, where we designed a dielectric metasurface to optimize the optical efficiency of the sensor arranged in a Bayer filter. With the addition of the designed metasurface, the optical efficiency of the RGB tri-band is increased by 90%, 24.4%, and 36%.
Appears in Collections:	[Graduate Institute of Optics and Photonics] Electronic Thesis & Dissertation

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