| 摘要: | 隨著科技日新月異的發展，高功率、高頻元件之需求日益增加。陶瓷具有高強度、 高穩定性與高熱傳導性等優點，是高功率電子產品的優良載板。陶瓷基板過去常使用雷 射與機械等方式進行加工，過程中往往因為材料的硬脆特性面臨許多加工上的困難。
面投影微立體光固化(Projection Micro-stereolithography, PμSL)技術是十分有前景的 積層製造(Additive Manufacturing, AM)技術之一，其透過微縮化的投影達到微米尺度的 列印。通過學者的改良更俱備了跨尺度製造的能力，彌補過往微米製造上的缺點，使微 米解析度之複雜結構可有更多方面的應用。
單層陶瓷基板的優點是設計簡單及製造成本低，若能使用積層製造以模組化方法一 次成型，並快速替換則有利於提升生產速度。本研究以PμSL 技術為基礎，開發卡匣式 陶瓷基板生胚製造系統，以積層製造方式避免過去雷射加工與機械加工可能之損傷與加 工限制，並利用卡匣式的設計簡化製程與提升生產速度。軟體部分使用C#程式語言開 發，將所有軟硬體設備整合至人機控制介面，並設計路徑生成程式給予使用者快速且直 覺的製造介面。為了解決卡匣替換造成的失焦問題，研究中透過OpenCV 函數達到自動 對焦，以此找出列印範圍內三點之垂直座標，並透過公式推算水平修正量，經驗證水平 度小於1.863 μm/mm。以不同縫合寬度與灰度做列印，量測結果並記錄數據，提出有效 之列印參數。為了改善製造方形孔洞時的失真，研究中設計圖形補償方法，並測試了不 同參數，使陶瓷漿料之面積匹配率從69.56%改善至96.66%。最後使用自行開發之卡匣 式陶瓷基板生胚製造系統根據上述參數實現最小34 μm 孔洞特徵之氧化鋯陶瓷基板生 胚，以驗證機台之功效。;With the rapid development of science and technology, the demand for high-power and high-frequency components is increasing. Ceramic has the advantages of high strength, high stability and high thermal conductivity. It is an excellent carrier for high-power electronic products. In the past, ceramic substrates were often processed by laser and mechanical methods, which often caused many processing difficulties due to the hard and brittle properties of the material.
Projection Micro-stereolithography (PμSL) technology is one of the most promising additive manufacturing technologies. It achieves micron-resolution printing through miniaturized projection. It solves the manufacturing difficulties of complex and tiny components in the past. At the same time, through the improvement of scholars, the ability of cross-scale manufacturing has been prepared which can make up for the shortcomings of the past micron manufacturing. So that the complex structure with micron resolution can have more applications.
The advantages of single-layer ceramic substrates are simple in design and low in manufacturing cost. When using the additive manufacturing method, if they can be formed in the form of cassettes at one time and replaced quickly, the production speed will be improved.
Therefore, this research develops a cassette-type green ceramic substrate production system by PμSL technology, which avoids the possible damage and processing limitations of laser processing and machining in the past by means of addtive manufacturing, and utilizes the cassette-type design to simplify the process and improve productivity. The software is developed using the C# programming language, integrating all software and hardware devices into the human-machine interface, and designing a path production program to give users a fast and intuitive interface. In order to solve the problem of out-of-focus caused by the replacement of the cassette, the OpenCV function is used to achieve automatic focusing in the research, so as to find the vertical coordinates of three points in the printing area, and calculate the horizontal correction amount through the formula. It is verified that the horizontal degree is less than 1.863 μm/mm. Print with different overlapping widths and grayscales, measure the results and record the data, and propose valid parameters. In order to improve the distortion when printing square holes, a pattern correction method was designed in the study, and different parameters were tested to improve the area matching rate of the ceramic from 69.56% to 96.66%. Finally, the self-developed cassette-type green ceramic substrate production system is used to realize the zirconia green ceramic substrate with the minimum 34 μm hole according to the above parameters to verify the function of the machine. |
