本研究設計一基於平面式架構磁通閘之三軸磁力計,搭配磁通傳導器將出平面磁場導入至平面式磁芯。結合PCB及FPC電路板製成一平面式架構磁通閘磁力計,搭配彼此正交之平面磁芯降低各軸向間之干擾,來達到不同軸向之磁場感測。利用FPC可撓性的特性,提升感應線圈總感應面積,在相同的單位尺寸下,能大幅提升各軸向間之感測靈敏度。 所提出之磁通閘磁感測器之同平面X軸在0~140T線性範圍內,具有靈敏度2478.3V/T;同平面Y軸在0~140T線性範圍內,具有靈敏度2360.1V/T;出平面Z軸在0~250T線性範圍內,具有靈敏度516.4,三軸之非線性度皆小於10%。 ;In this study, a three-axis magnetometer based on a planar structure flux gate is designed, and a flux conductor is used to guide the out-plane magnetic field into the planar magnetic core. Combining PCB and FPC circuit board to make a planar structure flux gate magnetometer, with planar magnetic cores orthogonal to each other to reduce the interference between each axis, to achieve magnetic field sensing in different axes. Using the flexible characteristics of FPC, the total sensing area of the induction coil is increased, and the sensing sensitivity between each axis can be greatly improved under the same unit size. The proposed fluxgate magnetometer has a sensitivity of 2478.3V/T on the planar X-axis within the linear range of 0~140T,and sensitivity of 2360.1V/T on the planar Y-axis within the linear range of 0~140T,and sensitivity of 516.4V/T on the out-of-plane Z-axis within the linear range of 0~250T, and the nonlinearity of the three axis is less than 10%.