在目前的 HDMI 2.1 和 CPU 或 GPU 的高速光連接系統中因為資 料量不斷的變大 (Tb/sec) 且每個通道的資料速度不斷升高，Co Package Optics (CPO) 已經被採用於光連接系統中。CPO 的高密度 封裝需要使用尺寸較小的單模光纖，和多模光纖比較起來光窗密度 可以更高。為了能將 VCSEL 光耦合進單模光纖，勢必使用單模的 VCSEL，然而單模 VCSEL 在特性上有許多缺點，例如:輸出功率較 小、Spatial Hole Burning (SHB)效應嚴重造成低頻 roll off 以及較差的抗光反射能力。 在本論文中會利用特殊的鋅擴散結構來得到高速、高亮度及低 相對雜訊強度的單模 VCSEL，我們最後得到了 27 GHz 的 3-dB 頻率 響應，和 7 mW 的輸出功率，眼圖的部分在 back-to-back (BTB)的條 件下 Data rate 可以傳到 56 Gbps，另外傳輸 500 米的條件下 Data rate可以傳到 46Gbps，並擁有優秀的抗反射能力，比較沒反射及反射光 為-6dB 的情況下 Relative Intensity Noise Optical Modulation Amplitude (RIN OMA)值變化僅 3 dB/Hz。上述結果和以前發表過文 章的單模 VCSEL 相比，有著顯著的進步。 我們設計最佳化的鋅擴散結構，將會對未來的 CPO 市場帶來革 命性的改變。 ;Co-Package Optics (CPO) is used in optical interconnect systems due to the growing data rates and increasing data speeds per channel in current HDMI 2.1 and high-speed CPU or GPU optical connectivity systems. To achieve high-density packaging, the use of single-mode fiber is crucial in the development of CPO. Single-mode fiber offers a higher number of channels compared to multi-mode fibers within the same cross sectional area of multicore fiber. To efficiently couple VCSEL light into single-mode fiber, it is necessary to utilize single-mode VCSEL. However,high power single-mode VCSEL has many disadvantages, such as, severe spatial hole burning (SHB) effect causing low-frequency roll off, and week immunity to the optical feedback. In this thesis, we demonstrate a novel design of Zn diffusion structure for single-mode VCSEL with high speed, high brightness and low relative noise intensity for >56G CPO application. By use of such new VCESL structure, we get a heavy damping frequency response with a 3-dB bandwidth at around 27 GHz, and an output power of 7 mW.The back-to-back (BTB) eye diagram data rate can reach 56 Gbps, on the other hand the data rate for OM4 transmission over 500 meters can reach 46 Gbps. The demonstrated device also exhibits strong immunity to the optical feedback. for the case of -6dB reflected power there is only 3 dB/Hz degradation in the Relative Intensity Noise Optical Modulation Amplitude(RIN OMA) (from -134 dB/Hz to -131 dB/Hz). Overall, our demonstrated Zn-diffusion structure will bring revolutionary changes to the future CPO market.
