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Items for Author "謝育霖"
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Showing 2 items.
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Date
Title
Authors
Bitstream
[機械工程研究所] 博碩士論文
2012-07-31
以OES光譜進行ECR-CVD太陽電池用氫化氧化矽薄膜製成分析;Using OES to analyze the hydrogenated silicon oxide film ECR-CVD process for solar cell
謝育霖
;
Hsieh,Yu-Lin
[機械工程研究所] 博碩士論文
2018-08-24
以電漿診斷工具進行太陽電池用矽薄膜製程開發;Development of silicon thin film process for solar cells with plasma diagnostic tools
謝育霖
;
Hsieh, Yu-Lin
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