反射式準共光程外差光柵干涉儀應用於長行程精密定位技術之研究

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姓名

盧洺霈(Ming-Pei Lu) 查詢紙本館藏

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光機電工程研究所

論文名稱

反射式準共光程外差光柵干涉儀應用於長行程精密定位技術之研究
(Study of reflective quasi-common path heterodyne grating interferometer and its application to long distance precision positioning)

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摘要(中)

本論文提出一套新穎的光學量測技術-反射式準共光程外差光柵干涉儀，並將這套干涉儀應用於長行程精密定位。準共光程的光路設計，提高了外差光柵干涉儀的穩定度。本系統使用反射式的光柵，使得量測系統容易架設於各種位移平台，並容易模組化。本研究設計一套類比電路來解調外差訊號，增加量測相位的速度並降低系統成本。接著利用反射式準共光程外差光柵干涉儀作為位置回授系統，進行長行程精密定位技術的開發。將具有長行程移動能力的壓電陶瓷馬達，以及具有精密定位能力的壓電致動器，組合成一組位移平台，使位移平台同時具備長行程及精密定位的能力。此外我們利用比例回授控制器，對此位移平台進行閉迴路控制。本論文所提出的反射式準共光程外差光柵干涉儀的理論解析度為0.2nm。考慮雜訊的影響下，本系統的量測解析度為4nm，量測速度為500?m/s。而定位解析度為5nm，定位速度為286?m/s.

摘要(英)

A novel optical displacement measurement system “Reflective quasi-common path heterodyne grating interferometer”was proposed. The nearly common path configuration increases the stability of heterodyne grating interferometer. We design an analog circuit to demodulate the heterodyne signal to increase the measurable speed and decrease the cost of the system. In this research, the reflective quasi-common path heterodyne interferometer is used as a displacement feedback system to feedback control a stage. The moving stage is composed of a coarse stage and a fine stage. The coarse stage is used for long-distance positioning while the fine stage is used for precision compensation. The coarse stage and fine stage is integrated and can provide long-distance movement with nanometric resolution. We use the proportional controller to compensate the error simultaneously. Theorically, the resolution of the reflective quasi-common path heterodyne grating interferometer is 0.2nm. After taking the noises into consideration, from the experimental results, the resolution of the interferometer is 4nm. And the measureable speed is 500?m/s. The positioning resolution is 5nm and the positioning speed is 286?m/s.

關鍵字(中)

★ 長行程精密定位
★ 光柵干涉術
★ 外差干涉術

關鍵字(英)

★ long distance precision positioning
★ heterodyne interferometry
★ grating interferometry

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vii
表目錄 ix
第一章緒論 1
1.1研究背景 1
1.2文獻回顧 2
1.2.1外差干涉術之文獻回顧 2
1.2.2光柵干涉術之文獻回顧 4
1.2.3精密定位平台之文獻回顧 5
1.3研究目的 7
1.4章節簡介 7
第二章基礎理論 8
2.1 外差干涉術 8
2.1.1 旋轉光柵產生外差光源 8
2.1.2 旋轉波片產生外差光源 10
2.1.3 電光晶體調制外差光源 10
2.1.4 塞曼效應產生外差光源 11
2.2 光柵干涉術 12
2.2.1 光柵位移引入繞射光相位變化 12
2.2.2 光柵干涉術 12
2.3 外差訊號相位解調 13
2.3.1鎖相放大器 13
2.3.2計算邊緣時間區間解調相位法 15
2.4 比例回授控制 15
2.5 小結 16
第三章系統架構 17
3.1反射式準共光程外差光柵干涉儀架構 17
3.2反射式準共光程外差干涉儀架構 19
3.3相位解調系統架構 23
3.3.1相位解調系統架構 23
3.3.2帶通濾波器設計 24
3.3.3 90°相位移動電路 26
3.3.4 低通濾波器 28
3.4長行程精密定位技術 30
3.4.1 控制程式流程 31
3.5小結 33
第四章實驗結果與討論 34
4.1量測實驗 34
4.1.1長行程量測實驗: 70 um弦波及三角波運動 34
4.1.2中行程量測實驗: 14 um弦波及三角波運動 37
4.1.3小行程量測實驗: 500 nm弦波及三角波運動 39
4.1.4小行程量測實驗:100 nm方波運動 41
4.1.5量測穩定度實驗 42
4.2控制實驗 44
4.2.1小行程步階控制實驗:50 nm、10 nm步階控制運動 44
4.2.2中行程控制實驗 47
4.2.3長行程控制實驗 50
4.2.4長行程重複性實驗 53
4.2.5定位穩定度實驗 55
4.3實驗討論 56
4.3.1量測解析度 56
4.3.2量測靈敏度 56
4.3.3量測速度測試 57
4.3.4定位解析度 58
4.3.5定位速度 58
4.4小結 59
第五章誤差分析 60
5.1系統誤差 60
5.1.1 偏振片方位角引入之非線性誤差 61
5.1.2 1/2波片方位角引入之非線性誤差 63
5.1.3 相位延遲器引入之非線性誤差 64
5.1.4 半波片相位誤差所引入之非線性誤差 65
5.1.5 偏振片消光比引入之非線性誤差 67
5.1.6 訊號振幅引入之非線性誤差 68
5.1.7 餘弦誤差 70
5.2隨機誤差 71
5.2.1 環境振動 71
5.2.2 光學元件及夾治具材料熱特性 71
5.2.3 電子雜訊 72
5.3小結 72
第六章結論與未來展望 73
6.1結論 73
6.2未來展望 73
參考文獻 74

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指導教授

李朱育(Ju-Yi Lee)

審核日期

2010-8-25

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