以奈米小球製作二維光子晶體共振波導之研究

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姓名

江之昀(Chih-yun Chiang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

以奈米小球製作二維光子晶體共振波導之研究
(The Study of 2D Photonic Crystal Guided-Mode Resonance Waveguide by Using Nanosphere)

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摘要(中)

利用奈米球鋪排成六角晶格形狀，來製作奈米等級的結構，具有製作方便、大面積及較佳的規律性等優點，可應用於生物檢測器及彩色濾波器等方面。本論文提出以單層鋪排奈米球取代黃光微影製程，製作大面積週期性奈米結構的二維共振波導，達到製程簡單的目標。
本論文利用嚴格耦合波理論方法模擬與設計出在週期780 nm時，分別探討填充因子，蝕刻深度以及旋轉角度對共振波長的影響。由以上參數改變的模擬結果可以得知，以週期780 nm的參數為例，其填充因子須大於0.6，才會有共振波長產生。蝕刻到底部的共振波導對於角度有較大的容忍度。我們以直徑750 nm的奈米球分別製作出不同週期之試片A:780 nm，B:753 nm及C:780 nm的二維共振波導濾波器其中試片C:780 nm的光柵為蝕刻到底部的結構。經由量測穿透頻譜的結果得知，試片A共振波長與半高寬λ(nm):Δλ(nm)為1106:17、1142: 22、1368:30，試片B共振波長為1155:27、1235:40、1365:24，試片C共振波長為1276:102、1624:151。同樣的驗證了其具有多模態的效果，而且試片C，在旋轉角度上有較高的容忍度。本研究驗證了以奈米小球製作二維共振波導濾波器的可行性，且可應用在寬頻濾波器，未來可改變奈米球週期來調製所需波長，應用到更多元件。

摘要(英)

This study fabricated a nano-structure in the shape of a hexagonal-lattice grating through the arrangement of nanospheres. This structure offers a number of advantages, including easy fabrication, excellent coverage, and structural regularity. Such structures have been applied to the development of biosensors and color filter. This study proposes that a single layer sedimentation of nanospheres be used as an easily fabricated alternative to photolithography .
This study observed the resonance behavior of the proposed two dimensional guided-mode resonant through rigorous coupled-wave analysis (RCWA). Incident wavelength, grating thickness, and grating fill ratio were selected as the parameters for simulations. Using period = 780 nm as an example, when the fill ratio ≧ 0.6, resonance was achieved. By broadening the angular tolerance of the self-suspended subwavelength grating, this study fabricated a three two-dimensional guided-mode resonant filter.
The measurement results of wavelength and full width half maximum (FWHM) were λ(nm):Δλ(nm), respectively. Sample A: 1106:17, 1142: 22, 1368:30; Sample B: 1155:27, 1235:40, 1365:24; Sample C: 1276:102, 1624:151. This study demonstrated that Sample C in multi-mode showed broadening of angular tolerance at an oblique angle of incidence.
This study demonstrated that two-dimensional guided-mode resonance filters can be fabricated through the use of nanospheres, which can simplify the process of fabricating such devices.

關鍵字(中)

★ 二維共振波導

關鍵字(英)

★ 2D GMR

論文目次

摘要 I
ABSTRACT II
目錄 III
圖目錄 V
表目錄 IX
第一章緒論 1
1.1共振波導濾波器簡介 1
1.2 研究動機 2
第二章共振波導濾波器原理 3
2.1光柵繞射原理 4
2.2波導理論 6
2.3等效折射率理論 9
2.4共振波導原理 12
2.5嚴格耦合波理論 15
第三章二維共振波導濾波器結構之設計 18
3.1 二維共振波導非極化相關之驗證 19
3.2 二維共振波導結構參數之設計 20
3.2.1 折射率對共振波長的關係 21
3.2.2角度容忍度對共振波長的關係 23
3.2.3波導深度對共振波長的關係 25
3.2.4光柵填充因子對共振波長的關係 27
第四章二維共振波導濾波器的製作 30
4.1製程儀器介紹 30
4.1.1電漿輔助化學氣相沉積系統 31
4.1.2感應耦合電漿蝕刻機 32
4.2二維共振波導濾波器製作流程 33
第五章二維共振波導濾波器量測 36
5.1量測儀器架設 36
5.2量測結果分析與討論 38
第六章結論 44
參考文獻 46

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指導教授

張正陽(Jenq -Yang Chang)

審核日期

2010-11-9

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