靈敏度可調式表面電漿共振感測器

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姓名

麥立偉(Li-wei Mai) 查詢紙本館藏

畢業系所

光機電工程研究所

論文名稱

靈敏度可調式表面電漿共振感測器
(Sensitivity-tunable Surface Plasmon Resonance Sensor)

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摘要(中)

本論文提出一套新穎的量測技術「靈敏度可調式表面電漿共振感測器」，利用外差干涉術量測共振現象的相位變化，具有高靈敏度、高解析度的優點。此外，透過調整系統中的四分之一波片方位角，可達到依待測物調整靈敏度的效果，是一套有潛力的二維度量測系統。
本研究使用純水溶液及不同濃度的酒精水溶液估算系統靈敏度及解析度，當待測物折射率較大時，增加四分之一波片方位角度可使系統有較佳的靈敏度；當折射率差異較大時，亦可調整方位角度使偵測區間增大。
經實驗證明本系統最佳靈敏度達1.7×10^5(°/RIU)，在系統穩定度為0.09度的情況下，最佳解析度達5.3×10^-7RIU，偵測範圍達2mm×2mm。

摘要(英)

A novel optical measurement technology “Sensitivity-tunable surface plasmon resonance sensor” is proposed. This system has advantage of high sensitivity and high resolution by employing heterodyne interferometry for SPR phase detection. Besides, the sensitivity is tunable according to difference of samples by adjusting the azimuthal angle of quarter wave plate. This technique is quite a potential sensing system with two-dimension.
In this study, the pure water and alcohol solutions are used to estimate sensitivities and resolutions. Increasing the azimuthal angle makes a better sensitivity while sample’s refractive index is higher. In additional, to tune the quarter wave plate can provide a larger dynamic range as the difference of refractive index larger.
According to the results, the best sensitivity of this system is 1.7×10^5 (°/RIU). The resolution is 5.3×10^-7 RIU with the stability of phase drift 0.09 degree. Meanwhile, the sensing area is 2mm×2mm.

關鍵字(中)

★ 差動偵測
★ 外差干涉術
★ 波長調制
★ 表面電漿共振

關鍵字(英)

★ differential detection
★ heterodyne interferometry
★ wavelength-modulated
★ surface plasmon resonance

論文目次

摘要 i
ABSTRACT ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 viii
第一章緒論 1
1-1研究背景 1
1-2文獻回顧 2
1-2-1表面電漿共振 2
1-2-2波長調制外差干涉術 3
1-2-3靈敏度 5
1-3研究動機、目的與方法 7
第二章基礎理論 9
2-1表面電漿共振原理 9
2-3空間濾波器原理 16
第三章實驗架構 17
3-1光學架構 17
3-1-1一維度系統架構 17
3-1-2二維度系統架構 22
3-2元件儀器介紹 26
3-2-1一維度系統之元件與儀器 26
3-2-2二維度系統之元件與儀器 30
3-3旋轉平台設定 32
3-4實驗流程 33
3-4-1一維度系統 33
3-4-2二維度系統 34
3-5實驗準備 35
第四章實驗結果與討論 36
4-1一維度系統實驗 36
4-1-1尋找存在最大靈敏度之方位角實驗 39
4-1-2尋找最大量測範圍之方位角實驗 41
4-1-3系統對折射率解析度 41
4-2相位解調實驗 43
4-3二維度系統實驗 46
4-3-1尋找存在最大靈敏度之方位角實驗 46
4-3-2系統對折射率解析度 47
4-3-3全場偵測實驗 48
4-4-1共振角誤差 50
4-4-2差動相位解調誤差 52
第五章結論與未來展望 54
5-1結論 54
5-2未來展望 55
參考文獻 56

參考文獻

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指導教授

李朱育(Ju-yi Lee)

審核日期

2011-11-8

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