建立於矽基光學平台之高分子聚合物波導光路

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姓名

李振宇(Jen-yu Li) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

建立於矽基光學平台之高分子聚合物波導光路
(Polymer Waveguides Based on Silicon Optical Benches)

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摘要(中)

隨著科技日漸發達，傳遞的資訊量以倍數成長，以電為媒介的傳遞方式因受限到傳統銅材料特性的限制，提升傳遞頻寬及速率方面以達到了極限，利用光做為高速傳遞媒介之光連接技術取代是一種解決路徑。
本研究提出一個具45°反射面之高分子聚合物波導光路，此技術可應用於晶片內或晶片與晶片間光學訊號傳遞。在架構上藉由一個具光學品質的矽基45°反射面，利用波長為1550 nm的紅外光源進入高分子聚合物波導經45°反射面轉折進入光接收偵測器(Power Detector)具45°反射面高分子聚合物波導光路包含45°反射面與長直矩形波導，其長直矩形波導結構大小為40 μm × 20 μm。
本研究完成長直矩形波導以及具45°反射面之高分子聚合物波導光路之光學模擬、製程與光學特性量測。經由設計的具45°反射面之高分子聚合物波導光路，在長直矩形波導部分，插入損耗為-2.49 dB，傳遞損耗為-2.085 dB/cm，出射端多模光纖空間位移容忍度在耦合能量損失1 dB時在垂直方向與水平方向約為44 μm；具45°反射面轉折波導光路部份，插入損耗為-5.62 dB，入射端單模光纖光源位移容忍度在耦合能量損失1 dB時在垂直方向約為24 μm，水平方向則為8 μm。

摘要(英)

In recent years, the optical interconnect is an important issue for communication technology. Because these are limitations of increasing transmission speed and bandwidth for traditional copper, the optical interconnect is the other approach to apply to the high-speed transmission.
In this paper, the polymer waveguide with a 45°reflector is introduced on the silicon optical bench. This technique can be applied to the optical interconnects of inter- or intra-chip applications. In the framework, the 1550 nm light source was coupled to polymer waveguide and bend to the power meter by 45°reflector. The proposed polymer waveguide fabricated on a silicon optical bench includes a Si-based 45° reflector and a straight rectangular waveguide with a cross-section of about 40 μm × 20 μm.
The insertion loss of straight rectangular waveguide is -2.49 dB, and its propagation loss is -2.085 dB/cm. At output multi-mode fiber, the 1-dB degradation tolerance in the vertical direction and the horizontal direction are about 44 μm. In the bending waveguide with a 45°reflector, the insertion loss is -5.62 dB, and the 1-dB degradation tolerance of input single-mode fiber is about 24 μm in the vertical direction, and is 8 μm in the horizontal direction.

關鍵字(中)

★ 高分子聚合物

關鍵字(英)

★ Polymer
★ Waveguide

論文目次

目錄
中文摘要 i
英文摘要 ii
目錄 iii
圖目錄 v
表目錄 ix
第一章序論 1
1-1 前言 1
1-2 研究動機與目的 8
第二章具45°反射面之高分子聚合物波導光路設計 10
2-1 高分子聚合物波導光路結構尺寸設計 10
2-2 具45°反射面之高分子聚合物波導光路結構光學模擬分 15
2-2.1 長直矩形波導光路結構光學模擬 15
2-2.2 具45°反射面波導光路結構光學模擬 18
第三章具45°反射面之高分子聚合物波導光路製作 23
3-1 長直矩形波導製作 23
3-2 具45°反射面波導光路製作 26
3-2.1 45°反射面製程 26
3-2.2 45°反射面之高反射率金屬層製程 29
3-2.3 波導光路製作 31
第四章高分子聚合物波導光路之量測與分析 35
4-1 長直矩形高分子聚合物波導光學特性量測 35
4-1.1 長直矩形波導光學準位量測 35
4-1.2 長直矩形波導傳遞損耗量測 41
4-2 具45°反射面之高分子聚合物波導光路光學特性量測 44
4-2.1 具45°反射面轉折波導光路插入損耗 44
4-2.2 具45°反射面轉折波導光學準位量測 47
第五章結論與未來展望 50
參考文獻 53

參考文獻

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指導教授

伍茂仁(Mount-Learn Wu)

審核日期

2011-7-6

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