以Fabry Perot Etalon 做雷射高斯光束發散角量測之研究

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吳思緯(Szu-Wei Wu) 查詢紙本館藏

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以Fabry Perot Etalon 做雷射高斯光束發散角量測之研究
(The laser gaussian beam divergence measurement by Fabry Perot Etalon)

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摘要(中)

本論文提出以Fabry Perot Etalon做為雷射高斯光束發散角量測之研究，主要是利用高銳度係數之Fabry Perot Etalon對於雷射高斯光束發散角的變化，使得當入射角改變之掃描結果造成第一亮纹中強度e-1所對應兩點角度間距寬窄的改變，並配合曲線擬合的方式將雷射光之發散角度快速的量測出。
本系統有著架構十分簡單、體積小、僅需單點量測和解析度高的優點。在雷射已達定溫狀態下，本系統的量測重複性之標準差為0.015 mrad、而系統量測解析度為0.021 mrad。

摘要(英)

A method for laser Gaussian beam divergence measurement by Fabry Perot etalon is proposed. The scan result by incident angle change correspond full width at half maximum of the first order fringe variation by high coefficient of finesse Fabry Perot etalon. With the curve fitting method, we can measure laser beam divergence quickly.
Our system has advantage of simple structure, small size, high resolution and only single point measuring. The experimental results demonstrate that the resolution of the system is 0.021 mrad and the standard deviation of repeatability is 0.015 mrad.

關鍵字(中)

★ 光學量測
★ 發散角量測
★ Fabry Perot Etalon

關鍵字(英)

★ 光學量測
★ 發散角量測
★ Fabry Perot Etalon

論文目次

目錄
摘要 i
Abstract ii
目錄 iii
圖目錄 vi
表目錄 vii
第一章緒論 1
1-1 研究背景 1
1-2 文獻回顧 2
1-2-1雷射高斯光束發散角量測之文獻回顧 5
1-2-2準直光束之檢測 12
1-2-3 Etalon之相關研究 10
1-2-4 Febry Perot Interferometer 於光學量測上應用相關文獻 12
1-3 研究目的 14
1-4 論文架構 15
第二章基礎理論 16
2-1 Fabry Perot Interferometer 16
2-1-1 Stoke’s relation 17
2-1-2 Multiple Beam Interference 18
2-1-3銳度係數F與穿透光強It變化之模擬 21
2-2高斯光束 23
2-2-1高斯光束傳播 23
2-2-2遠場光束半徑與發散角 25
2-2-3高斯光束等效模型之建立 26
2-3 小結 28
第三章演算法模型之建立 29
3-1角度法-雷射發散角量測 30
3-1-1角度法-雷射高斯光束發散角量測演算法模型 30
3-1-2角度法-雷射高斯光束發散角量測參數模擬分析 37
3-2 映像法-雷射發散角量測 46
3-1-1映像法-雷射高斯光束發散角量測演算法模型 47
3-1-2映像法-雷射高斯光束發散角量測參數模擬分析 51
3-1-3映像法-雷射發散角量測性能分析 59
3-3 小結 64
第四章實驗與結果分析 65
4-1量測步驟 68
4-2 量測結果 69
4-2-1-1定溫量測(雷射半徑=0.35mm) 69
4-2-1-1定溫量測(雷射半徑=0.23mm) 71
4-2-2非定溫量測 73
4-3 系統誤差分析 75
4-3-1步進馬達旋轉影響 75
4-3-2定溫波長飄動影響 77
4-3-3非定溫波長飄動影響 78
4-4 分析與討論 80
4-4-1量測重複性 80
4-4-2量測解析度 80
4-5 小結 81
第五章結論與未來展望 82
參考文獻 83

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指導教授

李朱育(Ju-Yi Lee)

審核日期

2012-8-20

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