博碩士論文 993204043 詳細資訊




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姓名 藍崇禎(Chung-chen Lan)  查詢紙本館藏   畢業系所 化學工程與材料工程學系
論文名稱 陽極氧化鋁奈米模板法製備尺寸可調控之金屬奈米點、奈米線、奈米管陣列之研究
(AAO-templated fabrication of size-controllable metal nanodots, nanowires and nanotubes.)
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摘要(中) 本研究我們使用新穎兩次陽極氧化製程成功製備出規則孔洞排列的超薄陽極氧化鋁膜。超薄陽極氧化鋁膜孔徑約為86 奈米,且厚度可調控在400-700奈米之間。將超薄陽極氧化鋁膜轉附至矽單晶基材上當作模板可成功於矽單晶基材上製備各式零維與一維金屬奈米結構。
本研究首先藉由超薄陽極氧化鋁模板與電子蒸鍍技術可於矽單晶基材上成功製備大面積規則有序排列的銀金屬奈米點,銀奈米點的直徑可經熱處理調控在41-24奈米之間。此外,本研究也結合直流電沉積與超薄陽極氧化鋁模板法成功地在矽單晶基材上製備準直有序排列之一維鎳金屬奈米線。鎳奈米線長度可由電沉積時間所調控,而所製備的鎳奈米線直徑約為82奈米,與超薄陽極氧化膜的孔徑大小相近,且其排列呈六方最密堆積,與陽極氧化鋁膜的孔洞排列結構相同。實驗中若藉由添加少量的Pluronic P123於鎳電鍍液中則可製備出高密度排列之鎳金屬奈米管,且鍍製時 Pluronic P123的濃度對鎳金屬奈米管的成長速率與外觀形貌影響十分顯著。不同實驗條件所製備各式金屬奈米結構之外觀形貌、晶體結構與組成成分變化,將利用SEM, TEM, SAED與EDS做有系統的分析探討。
摘要(英) In the study, we have proposed a novel two-step anodic oxidation method to fabricate ultra-thin anodic aluminum oxide (AAO) membranes with highly-ordered nanopore structures. The nanopore diameter of the ultra-thin AAO membrane was about 86 nm, and the thickness can be tuned from 400 nm to 700 nm. The ultra-thin AAO membranes were then transferred onto Si substrates and served as the template for the fabrication of various O-D and 1-D metal nanostructures on Si substrates.
By combining the ultra-thin AAO template and e-beam deposition techniques, large-area, well-ordered arrays of silver metal nanodots were successfully fabricated on Si substrates. After appropriate heat treatments, the diameter of the silver nanodots produced can be tuned from 41 nm to 24 nm. On the other hand, by using DC electrodeposition within the ultra-thin AAO templates, vertically-aligned periodic arrays of 1-D nickel metal nanowires on Si substrates were successfully obtained. The Ni nanowires array exhibits the same hexagonal arrangement as the AAO nanopore strictures.The length of Ni nanowires could be controlled by adjusting the electrodeposition time. The diameter of Ni nanowires was approximately 82 nm, corresponding to the nanopore size of ultra-thin AAO templates. By adding small amount of Pluronic P123 into the nickel electroplating electrolyte, high-density, well-aligned nickel nanotubes were successfully synthesized. The growth rate and morphologies of the nickel nanotubes were greatly affected by the concentrations of Pluronic P123. The morphologies, crystal structures, and compositions of the O-D nanodots and 1-D nanowires and nanotubes have been systematically investigated by SEM, TEM, SAED, and EDS analyses.
關鍵字(中) ★ 銀奈米點
★ 鎳奈米管
★ 鎳奈米線
★ 模板
★ 電鍍
★ 陽極氧化鋁
關鍵字(英) ★ Ag nanodot
★ Ni nanotube
★ Ni nanowire
★ electrodeposition
★ template
★ anodic aluminum oxide
★ AAO
論文目次 目錄
中文摘要 I
英文摘要 II
致謝 III
目錄 V
圖目錄 VII
第1章簡介 1
1-1 前言 1
1-2 奈米材料 2
1-3 微影技術 3
1-3-1微影技術的種類 4
1-4 陽極氧化鋁奈米模板 5
1-5 奈米線與奈米管之製備 9
1-6 奈米模板製備金屬奈米管 10
1-7 研究動機 11
第2章實驗步驟 13
2-1 在矽單晶基材上製備超薄陽極氧化鋁奈米模板 13
2-1-1 超薄陽極氧化鋁奈米模板之製程 13
2-1-2基材使用之前處理 14
2-1-3超薄陽極氧化鋁奈米模板轉附於基材表面 15
2-2在矽單晶基材上製備尺寸可調控之金屬奈米點陣列 15
2-2-1 金屬奈米點陣列之製備 15
2-2-2 尺寸可調控的金屬奈米點之製備 16
2-3 矽單晶基材上製備金屬奈米線陣列 16
2-4 電化學沉積法製備金屬奈米線/管陣列 16
2-5 實驗設備 17
2-5-1 氧化鋁模板製備系統 17
2-5-2 蒸鍍系統 17
2-5-3 退火爐系統 18
2-5-4 電沉積系統 18
2-6 實驗分析儀器 18
2-6-1 掃描是電子顯微鏡 18
2-6-2 穿透式電子顯微鏡 19
第3章結果與討論 20
3-1 在矽單晶基材上製備超薄陽極氧化鋁奈米模板 20
3-1-1 超薄陽極氧化鋁奈米模板之形貌分析 21
3-1-2 超薄陽極氧化鋁奈米模板轉附於基材表面之形貌分析 22
3-2 在矽單晶基材上製備尺寸可調控之金屬奈米點陣列 22
3-2-1 金屬奈米點陣列之形貌與結構分析 23
3-2-2 熱處理對金屬奈米點的形貌影響與結構分析 23
3-3 矽單晶基材上製金屬奈米線陣列 24
3-3-1 金屬奈米線之形貌與結構分析 25
3-4 電化學沉積法製備金屬奈米線/管 27
3-4-1 電鍍金屬奈米線/管之形貌與結構分析 27
第4章結論 30
參考文獻 31
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指導教授 鄭紹良(S.L.Cheng) 審核日期 2012-8-28
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