導電布拉格反射鏡運用於高效率發光二極體之研究

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姓名

宋永舜(Yung-shun Sung) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

導電布拉格反射鏡運用於高效率發光二極體之研究
(Research of applying conductive Distributed Bragg Reflectors to high-efficiency Light-Emitting Diodes)

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摘要(中)

本實驗研究著重於反射鏡的光學設計，利用高折射率(TNO)與低折射率(AZO)透明導電膜材料堆疊形成具導電性的布拉格反射鏡。分別運用於藍光LED與紅光LED，並實際做成元件量測。
透明導電膜的製備都在室溫下進行鍍製並且在真空環境下退火370度。在藍光LED部分，以P-GaN/ITO/(TNO/AZO)^4/TNO的設計最佳並實際鍍製反射率可達約81%，電阻率可達到1.453?10-3Ω-cm。模擬P-GaN/ITO/(TNO/AZO)^10/TNO時，反射率約可以達到94%。在紅光LED的部分，P-GaP/ITO/AZO/DBR/Ag的反射鏡設計可以比單純使用銀作為反射鏡反射率來的較高，實際做成元件並量測軸向光強可以發現有效的由478.3mcd提升至508.8mcd，在表面粗化後更是由812mcd提升至902mcd，有效提升軸向光強約11%。

摘要(英)

This study focused on optical design of reflectors and the films stacked by high refractive index material (TNO) and low refractive index (AZO) were deposited to make Distributed Bragg Reflectors. It was applied to blue LED, red LED and their device was made respectively for measurements.
All transparent conductive oxide films were post-annealed at 370℃ in a vacuum. In blue LED part, the design of P-GaN/ITO/(TNO/AZO)^4/TNO was optimal, reflectivity of the coating reached approximately to 81%, and the conductive reflector showed a resistivity of 1.453?10-3Ω-cm. We used optic design of P-GaN/ITO/(TNO/AZO)^10/TNO to simulate coating with reflectivity approximately 94%. In red LED part, the reflectivity of P-GaP/ITO/AZO/DBR/Ag design is better than those using silver as the reflector. Actually we made device and measured the value of axial intensity, which increased from 478.3 mcd to 508.8 mcd. After surface roughening, the value of axial intensity increased from 812 mcd to 902 mcd. The design effectively enhanced axial intensity up to 11%.

關鍵字(中)

★ 布拉格反射鏡
★ 透明導電膜
★ 高效率發光二極體

關鍵字(英)

★ transparent conductive oxide films
★ high-efficiency Light-Emitting Diodes
★ Distributed Bragg Reflectors

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vii
表目錄 x
第一章緒論 1
1-1 發光二極體發展歷史 1
1-2 氮化鎵系列材料 2
1-3 磷化物系列材料 5
1-4 研究動機 7
第二章基礎理論 9
2-1 LED發光基本理論 9
2-1-1 基本原理 9
2-1-2 直接能隙與間接能隙半導體 10
2-2透明導電膜 11
2-2-1 簡介 11
2-2-2 基本理論 12
2-2-3 光學與電特性 14
2-2-4 磁控濺鍍法 19
2-3 歐姆接觸 20
2-4 反射鏡 21
第三章實驗步驟與設備 23
3-1 導電膜實驗步驟與量測 23
3-1-1 實驗步驟 23
3-1-2 鍍膜設備與材料 24
3-1-3 四點探針 25
3-1-4 霍爾量測儀 26
3-1-5 光譜儀 28
3-2 特徵接觸電阻量測 28
3-2-1 TLM(Transmission Line Model) pattern 圖案製作 28
3-2-2 歐姆接觸電阻量測 29
第四章實驗結果與討論 32
4-1 透明導電膜製備 32
4-1-1高折射率TNO導電膜 32
4-1-2低折射率ITO與AZO導電膜 35
4-2 藍光LED 39
4-2-1 反射鏡光學設計 39
4-2-2 歐姆接觸 41
4-2-3 導電布拉格反射鏡 44
4-3 紅光LED 47
4-3-1 反射鏡光學設計 47
4-3-2 歐姆接觸 55
4-3-3 元件應用 56
第五章結論 59
參考文獻 61

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指導教授

李正中(Cheng-Chung Lee)

審核日期

2012-8-28

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